Utah-94-721002-System-Manual.pdf - 第50页
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System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉã=NMM
PROCESS CHAMBER
N
2
N
2
Vacuum
Switch
Turbo
Pump Controller
CM
Gauge
(100-mTorr)
Penning
Gauge
Turbo purge
valve
Backing
valve
Isolating
valve
Slit Valve
Chamber vent
N
2
THIS VALVE IS OPENED WHEN
THE MACHINE IS SWITCHED OFF
AND REMAINS OPEN FOR A
PERIOD SUFFICIENT TO ALLOW
THE FORELINE TO VENT.
NOTE 1:
Foreline
vent
NORMALLY
CLOSED -
SEE NOTE 1
N
2
Load lock
vent
A
UTOMATIC LOAD LOCK
Electromagnetically
operated shut-off valve
Pneumatically
operated shut-off valve
Vacuum gauge
head
Turbomolecular
pump
Sliding vane
rotary vacuum
pump
Roots pump
Gate valve
A
utomatic pressure
controller
KEY
APC
Controller
Pirani
gauge
SEE NOTE 2
NOTE 2:
THE TURBO PURGE LINE IS
FITTED WITH A FLOW METER
TO ALLOW THE FLOW RATE
TO BE MONITORED BY THE
PC 2000 SOFTWARE.
Fig 3.4: UC Davis 94-721001 vacuum system
Description
Printed: 22-Mar-06, 7:29 Page 3-13 of 22 UC Davis 94-721001 Issue 1: March 06
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PKV= d~ë=Ü~åÇäáåÖ=ëóëíÉã=
WARNING
CONTACT WITH TOXIC GASES CAN CAUSE DEATH OR SERIOUS INJURY.
USERS SHOULD PERFORM THEIR OWN RISK ASSESSMENT OF HAZARDOUS GASES TO
BE USED ON THE SYSTEM.
BEFORE VENTING THE PROCESS CHAMBER, ALWAYS ENSURE THAT THE SYSTEM IS
ADEQUATELY PURGED AND PUMPED; SEE ‘VENTING THE SYSTEM’ IN SECTION 5 OF
THIS MANUAL.
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The purpose of the gas pod is to feed a mixture of process gases, at specified flow rates, to
the process chamber. Selection of gases and flow rates are determined by the system
controller. A ‘clean gas’ line can be incorporated to feed an etch gas mixture into the process
chamber to remove process residues.
The gas pod, shown in Fig 3.5, comprises a steel case with a removable cover. An extraction
collar at the top of the case enables any leaked gas to be safely removed by a laboratory
extraction system. The back panel of the case is fitted with fixing holes for wall or frame
mounting.
Description
UC Davis 94-721001 Issue 1: March 06 Page 3-14 of 22 Printed: 22-Mar-06, 7:29
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉã=NMM
PROCESS GAS
OUT TO CHAMBER
100MM EXTRACTION
COLLAR
SINGLE- SMC
ASSEMBLY
SIX-WAY SMC
ASSEMBLY
GAS POD COVER
INTERLOCK MICROSWITCH
GAS POD
PCB
'CLEAN
GAS' LINE
COMPRESSED
AIR
IN
OUT
CONTROL
CABLE FROM
PLC / PCB
PROCESS GAS
SHUT-OFF
VALVE
Fig 3.5: 94-81-9-51 Gas pod
The case incorporates stations for up to six gas lines. The outputs from the gas lines are fed
into a common manifold which is connected to the process chamber gas line. Pneumatically
operated shut-off valves in each gas line are driven by associated SMC valves, powered by
compressed air and controlled by signals from the system controller. A separate SMC valve,
controlled by an interlock microswitch, prevents the opening of any gas shut-off valve when
the case cover is not fitted, or when either of the system interlock lines are open.
The Gas Pod PCB receives signals from the system controller, to control the SMC valves, and
the Mass Flow Controllers (MFC) fitted in the gas lines. For a circuit diagram of the Gas Pod
PCB, refer to drawing SE81D15942 in Volume 2 of this manual.
The ‘clean gas’ line flow rate can be set either manually by a variable valve (as shown in Fig
3.5) or by an MFC. Note that the ‘clean gas’ is usually supplied from a cylinder containing the
required gas mixture. An alternative method is to mix separate gases in optional additional
gas lines.
Description
Printed: 22-Mar-06, 7:29 Page 3-15 of 22 UC Davis 94-721001 Issue 1: March 06