Utah-94-721002-System-Manual.pdf - 第284页
^ää=lfmq=póëíÉãë l ñÑçêÇ =fåëíê ìãÉåíë =m ä~ëã~=q ÉÅÜåçäçÖó== System Manual SKO= iáåâ=pÉííáåÖë= Incorrect link settings can cause the AMU to ma lfunction. The factory default settings are given in the following table: Li…
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Refer to Symptom (F) in the Fault diagnosis chart (sub-section 6.1, page 15).
If the coupling between the motor shafts and capacitor spindles, has become disengaged or
loose, use the following procedure to align the shafts/spindles to their correct relative
positions.
1) Tighten the shaft and spindle grub screws.
2) Loosen the two bolts securing the motor/gear assembly to the AMU casing.
3) Carefully slide the motor/gear assembly away from the fan housing to disengage the
gear wheels from the capacitor.
4) Align the gear wheels to the capacitor depending on the AMU version as follows:
a) Air spaced capacitor
AMUs
(i) At the AMU control panel, set the relevant MANUAL/AUTO
switch to MANUAL.
(ii) Set the relevant MAX/MIN switch to MAX.
(iii) Fully mesh the capacitor vanes.
b) Vacuum capacitor
AMUs for RIE/PECVD
applications
(i) At the AMU control panel, set the relevant
MANUAL/AUTO switch to MANUAL.
(ii) Set the relevant MAX/MIN switch to MAX.
(iii) Set the relevant capacitor to maximum by rotating its
shaft anti-clockwise until the shaft becomes loose and
starts to unscrew from the capacitor body, then rotate
the shaft one turn clockwise.
c) Vacuum capacitor
AMUs for the ICP 180
application
For C1, use the procedure in b) above.
For C2, use the following steps:
(i) At the AMU control panel, set the C2 MANUAL/AUTO
switch to MANUAL.
(ii) Set the C2 MAX/MIN switch to MIN.
(iii) Set C2 to minimum by rotating its shaft clockwise until
the physical end stop is reached, and then rotate the
shaft one turn anti-clockwise.
d) Vacuum capacitor
AMUs for RF ion
source applications
For C1 and C2 alignment in this AMU, use the procedure for C2
in c) above.
5) On completion of capacitor alignment in Step 4), re-engage the motor/gear assembly
to the capacitor and tighten the securing bolts.
6) Check capacitor travel.
OIPT Automatch Unit
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SKO= iáåâ=pÉííáåÖë=
Incorrect link settings can cause the AMU to malfunction. The factory default settings are
given in the following table:
Link
Air
spaced
Capacitor
Low Power
Vacuum
Capacitor
High Power
Vacuum
Capacitor
Notes
LK1
A A A Setting A enables park position.
Setting B disables park.
LK2
B A B Coarse gain setting for C2 (‘A’ – low, ‘B’ –
medium, ‘c’ - high)
LK3
A A A Setting ‘B’ simulates RF on signal (for
testing only).
LK4
B A A Incremental Gain Signal. LK4 in position
‘A’ enables extra gain when in position
control. This is used when driving a
vacuum capacitor.
LK5
A A A Panel/PLC Controller. Position B for AMU
controlled by PLC
LK6
A A B Changes the biasing on the input
amplifier for C2 motor
LK7
B B A Changes the biasing on the input
amplifier for C2 motor
LK101
A A A Setting ‘A’ enables park position.
Setting ‘B’ disables park.
LK102
B A B Coarse gain setting for C1 (‘A’ – low, ‘B’ –
medium, ‘C’ - high)
LK104
B A A Incremental Gain Signal. LK104 in position
‘A’ enables extra gain when in position
control. This is used when driving a
vacuum capacitor.
LK105
A A A Panel/PLC Controller. Position ‘B’ for AMU
controlled by PLC
LK106
A A B Changes the biasing on the input
amplifier for C1 motor
LK107
A A B Changes the biasing on the input
amplifier for C1 motor
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System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== ^ää=lfmq=póëíÉãë
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This may be necessary to match a process beyond the normal operating range.
WARNING
HAZARDOUS RF VOLTAGE - CONTACT CAN CAUSE DEATH, SEVERE INJURY
OR BURNS
Any work requiring the removal of covers or panels must only be
performed by authorised personnel who are aware of the hazards
involved.
Turn off the RF generator completely before removing the smaller L-section cover. This
reveals the ends of the two variable capacitors and mounting positions for extra fixed
capacitors.
CAUTION
Components fitted must be suitable for RF power service. Low power circuit
devices will overheat quickly.
Suitable components are given in the following table:
OIPT Part Number Capacitance Rating
94-ECC1209 90pf 1kV
94-ECC1218 180pF 2kV
Change components according to the following table:
C1 going maximum
Add fixed capacitance in parallel with C1
See following NOTE.
C1 going minimum
Remove fixed capacitance in parallel with C1 Minimum is zero
C2 going maximum
1. Add fixed capacitance in parallel with C2
2. Increase coil inductance
See following NOTE.
C2 going minimum 1. Remove fixed capacitance in parallel
with C2
2. Decrease coil inductance
Minimum is zero fixed capacitance
NOTE: Variable capacitors C1 and C2 have a maximum capacitance of 1000pF and 500pF respectively.
For each of these variable capacitors there are three positions for fitting parallel ‘padding’
capacitors. Therefore, a maximum of 3 x 180pF padding capacitors could be fitted but usually
there is no need to fit more than one padding capacitor (i.e. 180pF).
OIPT Automatch Unit
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