Utah-94-721002-System-Manual.pdf - 第42页
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There are two types of interlocks used on the=mä~ëã~ä~Ä
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In all areas, the hardware interlock will override any software interlock. The hardware
interlocks, and their effect on the system components in the case of an interlock becoming
open circuit are as follows:
The electrical interlocks are divided into two circuits controlling the power to the system.
1) The mains power connection is made to a system Power Distribution Unit. The Power
Distribution Unit will disable all of its power outputs under the following conditions:
a) If the Emergency Off button is pressed.
b) If there is an interruption of the power input to the system.
c) If the Power Distribution Unit external facility interlock sensor link becomes
open circuit.
NOTE:
The Power Distribution Unit external facility interlock sensor
link enables the interlocks of external sensors, e.g. gas
detectors, exhaust scrubbers, etc., to be monitored by the Power
Distribution Unit. External interlock contacts connected to this
link should be Normally Closed, i.e. faulting to an Open Circuit.
2) The system internal 24V supply, comprises a process line, a chamber lid line and a
water flow switch (where fitted):
The 24V process line, which controls the process gases and plasma power supply
units, will be disabled if the Vacuum Safety Switch is open circuit, i.e. Chamber
Pressure > 600 mbar.
The 24V chamber lid line will be disabled if the chamber lid is OPEN, leaving the
system controller operational, but disabling all system components.
Description
Printed: 22-Mar-06, 7:29 Page 3-5 of 22 UC Davis 94-721001 Issue 1: March 06
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Emergency Off / Electrical
Fail
24V Process line 24V Chamber lid line
Interlock Fail Restore Fail Restore Fail Restore
System/Controller OFF Restart
Required
ON
ON
RF Generator OFF Powered, NOT
active
OFF Powered,
NOT active
OFF Powered, NOT
active
Process Gases OFF Powered, NOT
active
OFF Powered,
NOT active
OFF Powered, NOT
active
Automatic
Pressure
Controller Valve
CLOSED
CLOSED
**
NO
CHANGE
NO
CHANGE
CLOSED
CLOSED
Load lock
Slit Valve
HOLD
*
HOLD
HOLD
HOLD
HOLD
HOLD
Pumps OFF Pumps must be
restarted
NO
CHANGE
NO
CHANGE
OFF Pumps must
be restarted
* If closed, stays closed.
If open, will stay open until the loading arm is at its home position; then it will close.
** If ‘high pressure’ is signalled during process, APC opens and process step aborts. High pressure at
other times does not alter the APC.
Table 3.1: Consequences of open circuit interlocks
Other machine protection switches include:
a) A water flow switch. Low flow is reported to the system controller, which disables
specific devices until flow is restored.
b) Pump overload detection. If the primary pump stops because the over-current
protection switch opens, then the system aborts.
The software also monitors the position of the wafer handling mechanisms, ensuring safe
operation.
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For details of the services required for the base unit, refer to Section 2 of this manual.
Description
UC Davis 94-721001 Issue 1: March 06 Page 3-6 of 22 Printed: 22-Mar-06, 7:29
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The ICP chamber kit comprises the following components:
Process chamber.
Pumping port isolation valve and automatic pressure controller suitable for use with a
turbomolecular pump.
The ICP process chamber, shown in Fig 3.2, is machined from a single aluminium block with
the minimum number of O-rings to provide the highest vacuum integrity.
SLIT VALVE
SLIT VALVE
O-RING
LOCATING
PIN
VIEW
PORT
BLANKIN
G
PLATE
Cartridge heater (if fitted)
Inserted into a hole in the
chamber base (one in each
corner)
Fig 3.2: 94-100-3-41C process chamber
The chamber is fitted with the following ports:
a) Single view port fitted with an RF shield for viewing the plasma. Note that the view
port is mounted on a blanking plate, which can be removed to provide access to the
chamber interior.
b) Pumping port.
c) Wafer transfer port to which is attached a pneumatically operated gate valve.
d) Wafer clamp port.
e) Process gas inlet port.
f) Two ports for the connection of vacuum measurement components.
The pneumatically operated gate valve, for connecting to the selected wafer insertion device,
is attached to the chamber by six claw bolts and is positioned by two locating pins (dowels).
Sealing is provided by a rectangular O-ring.
Description
Printed: 22-Mar-06, 7:29 Page 3-7 of 22 UC Davis 94-721001 Issue 1: March 06