Utah-94-721002-System-Manual.pdf - 第286页
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This may be necessary to match a process beyond the normal operating range.
WARNING
HAZARDOUS RF VOLTAGE - CONTACT CAN CAUSE DEATH, SEVERE INJURY
OR BURNS
Any work requiring the removal of covers or panels must only be
performed by authorised personnel who are aware of the hazards
involved.
Turn off the RF generator completely before removing the smaller L-section cover. This
reveals the ends of the two variable capacitors and mounting positions for extra fixed
capacitors.
CAUTION
Components fitted must be suitable for RF power service. Low power circuit
devices will overheat quickly.
Suitable components are given in the following table:
OIPT Part Number Capacitance Rating
94-ECC1209 90pf 1kV
94-ECC1218 180pF 2kV
Change components according to the following table:
C1 going maximum
Add fixed capacitance in parallel with C1
See following NOTE.
C1 going minimum
Remove fixed capacitance in parallel with C1 Minimum is zero
C2 going maximum
1. Add fixed capacitance in parallel with C2
2. Increase coil inductance
See following NOTE.
C2 going minimum 1. Remove fixed capacitance in parallel
with C2
2. Decrease coil inductance
Minimum is zero fixed capacitance
NOTE: Variable capacitors C1 and C2 have a maximum capacitance of 1000pF and 500pF respectively.
For each of these variable capacitors there are three positions for fitting parallel ‘padding’
capacitors. Therefore, a maximum of 3 x 180pF padding capacitors could be fitted but usually
there is no need to fit more than one padding capacitor (i.e. 180pF).
OIPT Automatch Unit
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The capacitors drive automatically to the park positions if:
the AMU is set to Auto
the RF is off
the circuit board links enable parking
The park positions can be adjusted when all of these conditions are satisfied, by altering the
corresponding potentiometer with a small flat-bladed screwdriver. The capacitor will move
when the potentiometer is adjusted, and the park position is displayed as the capacitor
position.
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UK
Oxford Instruments Plasma Technolgy
North End, Yatton,
Bristol, BS49 4AP
Tel: +44(0)1934 837000
Fax: +44(0)1934 837001
Email:
plasma.technology@oxinst.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
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Toll Free +1 800-447-4717
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instruments.com.sg
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1F, No 23 Jing-Shang 19
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Street,
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Email:
oipt.sales@oxford-
instruments.com.sg
OIPT Automatch Unit
Issue 6: February 05 Page 20 of 20 Printed: 5-Jan-06, 8:03
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Issue 2: November 2002