Utah-94-721002-System-Manual.pdf - 第68页

mä~ëã~ä~Ä póëíÉãNMM lñÑçêÇ =fåëíêìã Éåíë= mä~ëã~ =qÉÅÜåçäçÖó == System Manual Fig 5.6: Run log page .............................................................................................................. 5-28 Fig …

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM

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Operating instructions ............................................................................................5-1

5.1 Failure of quartz and alumina components under vacuum.........................................5-3

5.2 System power-up.............................................................................................................5-4

5.3 System shut down and restart........................................................................................5-5

5.3.1 Emergency shut down.............................................................................................5-5

5.3.2 Routine shut down..................................................................................................5-5

5.3.3 Mains Power failure ................................................................................................5-5

5.3.4 Software abort.........................................................................................................5-5

5.3.5 System shut-down procedure.................................................................................5-6

5.3.6 System restart following an emergency stop, power failure, or software abort5-6

5.3.7 System response to loss of services.........................................................................5-8

5.4 Operator control ...........................................................................................................5-10

5.4.1 Turning screen savers and power saver options off............................................5-10

5.4.2 Logging on.............................................................................................................5-11

5.4.2.1 Editing users details ....................................................................................5-11

5.4.3 System alerts ..........................................................................................................5-14

5.4.4 Pumping down.......................................................................................................5-15

5.4.5 Automatic process run ..........................................................................................5-16

5.4.6 Single button automatic process run...................................................................5-17

5.4.7 Production mode...................................................................................................5-18

5.4.8 Manual process run ...............................................................................................5-19

5.4.9 Venting the system................................................................................................5-20

5.5 Creating and editing recipes ........................................................................................5-21

5.5.1 Working with recipe steps....................................................................................5-21

5.5.2 Working with recipes ............................................................................................5-22

5.6 Process Datalog .............................................................................................................5-24

5.6.1 Select Log page......................................................................................................5-24

5.6.1.1 Saving a log file as text for use in Microsoft Excel™................................5-25

5.6.2 Run log page..........................................................................................................5-28

5.6.3 Leak detection and MFC calibration log page ....................................................5-29

5.7 Operator adjustments...................................................................................................5-30

5.7.1 Manual adjustment of the RF matching unit......................................................5-30

5.7.2 Adjusting the nitrogen regulator outlet pressure ..............................................5-31

5.7.3 Rotary/dry pump N

purge flow rate adjustment ...............................................5-32

5.8 PC 2000 screens..............................................................................................................5-33

5.8.1 Pump control page................................................................................................5-33

5.8.2 Robot control page ...............................................................................................5-36

5.8.3 Recipe page............................................................................................................5-37

5.8.4 Production mode page..........................................................................................5-39

5.8.5 Chamber 1 process control page..........................................................................5-40

5.8.6 Leak detection page..............................................................................................5-45

5.8.7 Mass flow calibration page...................................................................................5-47

5.8.8 Service mode..........................................................................................................5-48

5.8.8.1 Transferring wafers in service mode..........................................................5-49

5.8.8.2 Exiting from service mode..........................................................................5-50

5.8.9 System log page.....................................................................................................5-51

5.9 Log files..........................................................................................................................5-52

Fig 5.1: Menu bar.....................................................................................................................5-10

Fig 5.2: Typical system alert ....................................................................................................5-14

Fig 5.3: Recipe screen ..............................................................................................................5-21

Fig 5.4: Step Commands pop-up menu..................................................................................5-22

Fig 5.5: Select Log page...........................................................................................................5-24

Operating Instructions

Printed: 22-Mar-06, 10:42 Page 5-1 of 52 UC Davis 94-721001 Issue 1: March 06

mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

Fig 5.6: Run log page.............................................................................................................. 5-28

Fig 5.7: Typical leak detection and MFC calibration log page............................................. 5-29

Fig 5.8: Typical AMU control panel ....................................................................................... 5-30

Fig 5.9: N

Pressure regulator/gauge..................................................................................... 5-31

Fig 5.10: Pump control page.................................................................................................. 5-33

Fig 5.11: Pump control page vacuum mimic......................................................................... 5-34

Fig 5.12: Pump control page operator interface.................................................................. 5-34

Fig 5.13: Robot control page.................................................................................................. 5-36

Fig 5.14: Recipe page.............................................................................................................. 5-37

Fig 5.15: Production mode page............................................................................................ 5-39

Fig 5.16: Chamber 1 process control page............................................................................ 5-40

Fig 5.17: Leak detection page................................................................................................ 5-45

Fig 5.18: Mass flow calibration page..................................................................................... 5-47

Fig 5.19: Service mode page .................................................................................................. 5-48

Fig 5.20: Wafer transfer in service mode.............................................................................. 5-49

Fig 5.21: System log page....................................................................................................... 5-51

Operating Instructions

UC Davis 94-721001 Issue 1: March 06 Page 5-2 of 52 Printed: 22-Mar-06, 10:42

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM

WARNING

BEFORE ATTEMPTING TO SWITCH ON (POWER UP OR OPERATE THE SYSTEM), READ

AND ENSURE THAT YOU UNDERSTAND SECTION 1 - HEALTH AND SAFETY AT THE

BEGINNING OF THIS MANUAL.

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Induction coupled plasma sources contain quartz or alumina tubes or windows under vacuum,

which may be subject to attack by the plasma process. If these components fail whilst under

vacuum, an implosion can occur. This should not present a safety hazard, provided the

equipment is used with all covers and screens in place, but may cause damage to system

components.

Failure by implosion becomes more likely as the components age; therefore they should be

regarded as consumable items. A programme of regular inspection and renewal of these

components is necessary to minimise the risk of implosion.

WARNING

BEFORE POWERING UP THE SOURCE, ENSURE THAT ALL COVERS AND SCREENS ARE

FITTED CORRECTLY. DO NOT REMOVE THE COVERS OR SCREENS WHILST THE SOURCE

IS UNDER VACUUM.

Operating Instructions

Printed: 22-Mar-06, 10:42 Page 5-3 of 52 UC Davis 94-721001 Issue 1: March 06