Utah-94-721002-System-Manual.pdf - 第223页

System Manual lñÑçêÇ= fåëíêìãÉ åíë=m ä~ëã~ = qÉÅÜåçäçÖó== lfmq=póëíÉãë OKN= oÉÅáêÅìä~íáçå=ï~íÉê= WARNING CHILLERS HAVE COMPONENTS, WHICH BECO ME COLD ENOUGH TO CAUSE SERIOUS INJURY. READ THE MA NUFACTURER’S MANUA LS BEFO…

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There are two acceptable methods of applying cooling / warming water to an OIPT system:

Recirculation: Water is pumped through the system by a dedicated *heater / chiller or heat

exchanger. After passing through the system, the temperature of the water

is adjusted before recirculating through the system.

*Many customers have a water recirculation facility shared by several

systems. This shared facility seldom provides water of suitable quality, and

so cannot usually be used for cooling any part of the OIPT system without

the use of a heat exchanger dedicated to the OIPT system.

Total Loss

Cooling:

Municipal (drinking quality) water is applied to the system from a mains

supply, passed through the system to cool it, then fed to a drain for

disposal.

Water failing to meet the recirculation or total loss cooling specifications must not be put

into the system without close consultation with OIPT.

In some circumstances, it may be appropriate to use a combination of recirculation cooling

and total loss cooling in one system.

It is recommended that the customer uses a dedicated heater/chiller either for the whole

system, or at least for the critical components. Note that chillers, which cool only, can give

problems with condensation on chamber components in some environments. This is a

particularly important consideration for production systems of the batch-load type. In severe

cases, they can produce sufficient condensation to damage components such as RF power

supplies, ferrofluidic seals and automatch units. Any damage so caused cannot be covered by

the system warranty.

Note that if a heater-chiller is used to provide warm water (above 30

C) for heated parts of

the system, then items such as the turbo pump will need an independent water supply.

Items such as turbomolecular pumps can be cooled with total loss cooling if they are of

stainless steel construction and if the water is suitable. If the water is not suitable, then a heat

exchanger may be necessary.

Total loss cooling cannot be used on any components that have aluminium in direct

contact with the coolant. See sub-section 2.1.

Services Specifications

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System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== lfmq=póëíÉãë

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WARNING

CHILLERS HAVE COMPONENTS, WHICH BECOME COLD ENOUGH TO CAUSE SERIOUS

INJURY. READ THE MANUFACTURER’S MANUALS BEFORE INSTALLING, OPERATING

OR MAINTAINING CHILLERS, AND ENSURE THAT ADEQUATE PROTECTIVE CLOTHING

IS WORN.

Recirculation water is used in systems where the user does not wish to consume water at a

high rate, or where it is wished to supply water to the system at a constant temperature.

Some systems contain aluminium in direct contact with coolant. These are the fçåÑ~Ä=RMM=

mäìë, the fçåÑ~Ä=PMM=mäìë, and mä~ëã~ä~Ä systems fitted with tables or turbomolecular pumps

with plain aluminium cooling channels. Certain aluminium chambers are also included.

However, the fçåÑ~Ä=PMM=mäìë does not contain aluminium in contact with water, unless it is

in the turbomolecular pump.

In these aluminium-containing systems, it is MANDATORY that the approved coolant is used

at all times. If the approved coolant and installation are not used, the system warranty will

not cover any damage caused by the coolant either directly or indirectly to the system or to

anything else.

It is the customer's responsibility to comply with the above requirement. If the customer has

any doubt as to whether their system falls into this category, they must contact OIPT for

further advice.

In systems that do not contain aluminium components, severe corrosion can still sometimes

occur: water will collect corrosive chemicals, and will be lacking in the oxygen that protects

stainless steel. We strongly recommend that the approved coolant is used. If an alternative

product or water is used, then it is entirely the customer’s responsibility to check for any signs

of corrosion or contaminated water. If the customer’s coolant has not been approved in

writing by OIPT, then the system warranty will not cover any damaged caused by the coolant

either directly or indirectly to the system or to anything else

The approved installation and coolant are shown in sub-section 2.1.1 and in Fig 2.1. Note that

the total water flow meter and the isolation valves are recommended for cooling monitoring

and ease of maintenance.

Customers should note, for example, that certain types of inhibitor will damage the pumps of heater/chiller units, and that the use

of municipal (drinking water) or deionized water can introduce harmful chemicals into the system. If plain water is used, distilled

water is by far the safest option.

Services Specifications

Printed: 6-Jan-06, 8:44 Page 5 of 22 Issue 16: April 05

lfmq=póëíÉãë lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

DEDICATED

HEAT EXCHANGER

CHILLER

PLASMALAB

IONFAB

SYSTEM

ISOLATION

VALVES

10-MICRON METAL MESH FILTER

MAXIMUM PRESSURE DROP AT

RATED FLOW RATE 0.15 BAR (2.2 PSI)

TOTAL WATER FLOW

METER OF APPROPRIATE

RANGE

(FITTED WITH AN

EXTERNAL BYPASS

HAVING A CAPACITY OF

100% FLOW)

Fig 2.1: Recommended basic recirculation installation

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CAUTION

If clear (i.e. transparent) tubing is exposed to sunlight, algal growth can develop,

which can restrict coolant flow.

It is MANDATORY that clear tubing is not used in any part of the cooling system.

OIPT recommends the use of either black or dark green tubing.

CAUTION

It is the customer's responsibility not to exceed a pressure of 4.2 bar, or other

limit that has been set for the system. Exceeding this safe pressure may cause

irreparable damage to system components.

The water must be kept warm enough to prevent condensation on chamber surfaces and

outside system components. This applies to those parts of the system inside the clean room

and those parts in a service area. Condensation can damage components such as RF power

supplies, ferrofluidic seals and automatch units. Any damage so caused cannot be covered by

the system warranty.

Services Specifications

Issue 16: April 05 Page 6 of 22 Printed: 6-Jan-06, 8:44