Utah-94-721002-System-Manual.pdf - 第135页

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~ =qÉÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . SKNM= d~ë=Ü~åÇäáåÖ=ëóëíÉã= WARNING BEFORE ATTEMPTING ANY…

mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

fitted to load locks and transfer chambers is not so critical, therefore the manufacturer’s

recommendations can be used.

The ATP turbo pumps are supplied with series ACT intelligent controllers which are menu-

driven. The ‘SET-UP’ menu allows the re-greasing interval to be set so that a visual warning

with an optional audible alarm is displayed at the relevant time. Note that this visual warning

does not require any action immediately; it only indicates that the bearing should be re-

greased at the next available opportunity. If required, the visual warning and audible alarm

can be disabled via the ‘SET-UP’ menu.

When the pumps are supplied, the ACT controller is pre-set with a 5,000 hour re-grease

interval. If the pumps are running continuously, the visual re-grease warning will be

automatically triggered after approximately seven months.

The customer is advised to use the ‘SET-UP’ menu to set the re-greasing interval for the pump

fitted to his system. Refer to the pump manufacturer’s manual. Note that this change takes

approximately five minutes.

When the re-greasing time is reached, lubrication is carried out using a pre-loaded syringe to

apply a metered quantity of a specific grease to one point on the bearing. Refer to the pump

manufacturer’s manual. The Alcatel part numbers of the syringes are:

Pump Type Pre-loaded Syringe Part Number

ATP80 056993

150C/400HPC/900HPC 101924

Note that the grease syringe has a limited shelf life so shouldn’t be ordered from the Alcatel

service centre until it is needed. Alcatel exercises strict stock control on this item to ensure

that the grease is always in good condition.

Once the grease has been applied to the bearing, it needs to be evenly distributed around

the bearing. This is done automatically by using the ACT controller’s ‘RUNNING IN’ menu.

Note that the grease distribution takes approximately 2.5 hours.

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Some systems incorporate a bake-out collar fitted to the turbo pump to assist heating the

process chamber to approximately 50ºC - 60ºC.

If the flow rate of the cooling water to the turbo pump is too high, the pump will be over

cooled, thus reducing the heating effect of the bake-out collar.

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Refer to the manufacture’s literature for details of the maintenance required.

Maintenance

UC Davis 94-721001 Issue 1: March 06 Page 6-16 of 22 Printed: 22-Mar-06, 7:41

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

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WARNING

BEFORE ATTEMPTING ANY MAINTENANCE WORK ON THE GAS HANDLING SYSTEM,

ELECTRICALLY ISOLATE THE SYSTEM BY SWITCHING OFF AND LOCKING OFF THE

WALL-MOUNTED SAFETY ISOLATION BOX. PROCESS GASES USED MAY BE TOXIC OR

FLAMMABLE. ADOPT THE CORRECT PROCEDURES WITH REGARD TO PURGING

BEFORE REMOVING OR LOOSENING COMPONENTS CARRYING THESE GASES. WEAR

PROTECTIVE CLOTHING.

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Ensure the gas pod and its fixings are secure.

IMPORTANT: OIPT gas pods typically weigh >40kg. Ensure the wall and gas pod

fixings are sturdy enough to bear at least four times the weight of

the gas pod.

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If valves need cleaning, repair or re-calibration:

1) Make sure valve has been thoroughly purged before removal.

2) Discuss with the vendor the return of the Mass Flow Controllers for service work.

Inform the vendor if hazardous gases have been used.

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The process gas filter elements will need replacing at a frequency that depends on both the

nature and purity of the process gases, and of other materials that come into contact with

them. The filters could need changing more or less often than annually.

1) Make sure line has been thoroughly purged before removal.

2) Unscrew union nut and remove assembly.

3) Tap filter element lightly on side with a fibre mallet to loosen and remove element.

4) Fit new element.

5) Re-assemble.

Maintenance

Printed: 22-Mar-06, 7:41 Page 6-17 of 22 UC Davis 94-721001 Issue 1: March 06

mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

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CAUTION

When changing or topping-up the lubricating oil in a pump, always use oil of the

same brand and type. If a change of brand or type is contemplated, refer to

Oxford Instruments Plasma Technology for advice.

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The lubricating oils used for pumps where the oil comes into contact with the pumped gases,

i.e. oil-sealed pumps such as rotary vane types, should be chosen to meet the specific

characteristics necessary for the process involved.

The vapour pressure must be low at the temperatures reached at the rubbing surfaces.

Viscosity should not vary significantly over the temperature range involved, and the water

absorption rate and content must be low.

Lubricating oils generally fall into one of two categories: mineral (hydrocarbon) based oil or

synthetic oil such as perfluorinated polyether. The synthetic oils are normally used where they

come into contact with strong oxidants such as nitrogen dioxide, oxygen, or one of the

halogens.

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Perfluorised polyether (PFPE) lubricants have the following properties:

a) They are stable up to 350

C, i.e. they do not decompose below this temperature.

b) They are chemically inert. They will, however, react with Lewis acids (BCl

, AlCl

etc.)

at temperatures over 100

c) They do not polymerise under the impact of high-energy radiation.

d) Since they tend not to keep contaminants suspended, pumps using these lubricants

must always be fitted with suitable oil filters.

e) They do not 'age' and therefore, if used correctly, need not be replaced during the

lifetime of the pump.

f) Any contaminants in the lubricant may be removed by fitting clean filters and

letting the pump run for several hours with inert gas ballast, the intake port having

been closed.

g) They do not protect metal surfaces against corrosion. Pumps should therefore always

be flushed with inert gas. Pumps using PFPE should be allowed to run continuously.

h) PFPE is incompatible with hydrocarbon oils, i.e. mineral oils, conventional greases

and cleaning agents.

i) If a pump uses PFPE lubricant only Freon 113 or Frigen 113 may be used as a cleaning

agent, and only PFPE grease may be employed.

Maintenance

UC Davis 94-721001 Issue 1: March 06 Page 6-18 of 22 Printed: 22-Mar-06, 7:41