Utah-94-721002-System-Manual.pdf - 第341页

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 Gas Handling = Item OIPT Part No. Qty Description 1 MD81A22487 1 GAS POD BOX 2 MD31B18526 1 GAS POD L…

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mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Gas Handling Issue 2: November 02
VKO= NOJäáåÉ=Ö~ë=éçÇ=EUNJVJSNF=
Programmable Logic
Controller
See Sub-section 0.4
PCB3
Gas Lines
9-12
PCB1
Gas Lines
1-4
PCB2
Gas Lines
5-8
Section 9 Page 4 of 10
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Gas Handling
=
Item OIPT Part No. Qty Description
1 MD81A22487 1 GAS POD BOX
2 MD31B18526 1 GAS POD LID
3 MA81D14783 1 GAS CONNECTION LINE
4 MA81D15070 1 MANIFOLD GAS OUT PIPE
5 G/AIR/VLV/506 2 6 WAY SMC ASSY.SPASBR10
6 G/AIR/VLV/501 2 SINGLE SMC ASSEMBLY. SPASBR01
7 MA31Z18421 3 300 PLUS GASES PCB2 ASSY
8 EXP0701 1 B&R MINICONTROLLER
EXP0730 1 B&R DIGITAL MODULE 16 I/P
EXP0725 1 B&R ANALOGUE MODULE.4
EXP0750 3 B&R ARCNET INTERF. EE32-0
10 MA81Z16005 3 PLC INTERFACE PCB
11 ESZ9102 1 DOOR INTERLOCK MICRO-SW SPDT
12 81-9-11 NON-TOXIC GAS LINE (SEE SUB-SECTION 9.3)
13 81-9-21 TOXIC GAS LINE (SEE SUB-SECTION 9.4)
14 81-9-31 1 CLEAN GAS LINE (SEE SUB-SECTION 9.5)
Note - For PLC components, see
Sub-section 0.4.
=
Printed: 16-Jan-06, 15:55
Section 9 Page 5 of 10
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Gas Handling Issue 2: November 02
VKP= kçåJíçñáÅ=Ö~ë=äáåÉ=EUNJVJNNF=
GAS CONNECTION LINE
(STAINLESS STEEL)
GROMMET
PNEUMATICALLY
CONTROLLED
SHUT-OFF
OUTLET VALVE
2 µm FILTER
MASS
FLOW
CONTROLLER
GAS OUT
MANIFOLD
2
1
Item No. in
Illustration
Part Number Description
MA81D15065 NON-TOXIC GAS KIT TYPE 'A' (all welded pipework
including filter and control valve but excluding MFC
and MFC cable)
G/GAS/FIT/614C 1/4 GASKET. RETAIN SS4VCR2GR (USED IN ALL VCR
FITTINGS)
1 * MASS FLOW CONTROLLER
2 MA00Z21746 MKS MASS FLOW CABLE ASSY
* Mass Flow Controllers are not supplied with the gas line, they vary in type according to each
customer's requirement. Please quote the part number on the unit if spares are required.
Section 9 Page 6 of 10
Printed: 16-Jan-06, 15:55