Utah-94-721002-System-Manual.pdf - 第87页
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉ ÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM RKR= `êÉ~íáåÖ=~åÇ=ÉÇáíáåÖ=êÉÅáéÉë= Fig 5.3: Recipe screen This page is used to assemble and store in memory all the set points and instructions wh…
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11) When the ‘Process Complete’ message is displayed, select the Pump Control page
and move the wafer from the process chamber to the Automatic load lock using the
same method as the transfer in.
12) Open the Automatic load lock’s lid and remove the wafer.
13) If required, the system can now be vented, see sub-section 5.4.9 page 5-20.
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WARNING
CONTACT WITH TOXIC GASES CAN CAUSE DEATH OR SERIOUS INJURY.
BEFORE VENTING THE PROCESS CHAMBER, ALWAYS ENSURE THAT THE SYSTEM IS
ADEQUATELY PURGED AND PUMPED.
Do not vent a system which has used toxic gases unless the system has been adequately
pumped first.
For example: Gases having Threshold Limit Values (TLVs) of 1ppm or below, e.g.
Chlorine, require at least 20 minutes pumping before venting.
After venting, there may still be residual gases in the process chamber. Consider wearing
suitable personal protection, e.g. a respirator.
To vent the system, use the following steps.
1) From the System menu, select the Pumping option.
2) On the Pump Control page, select the STOP button then the VENT button for each
chamber. Note that the vent sequence is controlled by a timer to allow time for the
turbo pumps to ‘spin’ down.
3) When all of the ‘Vent Time Left’ timers have decremented to zero, all of the pumps
have been switched off automatically, and the complete system has been vented.
Do not attempt to open the process chamber lid until the vacuum switch has changed status,
i.e. to its high-pressure status (In this condition, on the Pump Control page the vacuum status
field will display ‘FAULT’).
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-20 of 52 Printed: 22-Mar-06, 10:42
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
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Fig 5.3: Recipe screen
This page is used to assemble and store in memory all the set points and instructions which
make up a Recipe for an Automatic Mode run. These recipes consist of a sequence of process
Steps. ‘Drag and Drop’ facilities are provided to copy library steps into a recipe.
NOTE: For a description of the facilities on this page, refer to sub-section 5.8.3, page 5-37.
The Recipe option (accessed from the PROCESS button) displays the recipe page for the
process chamber. This page allows you to create / edit recipes and the recipe steps that they
contain.
NOTE: Before creating / editing recipes, make sure that you understand the operation of
key components of the system to ensure that recipes proceed as expected.
A recipe is created by adding steps from the Step Library to the Recipe Step Name fields. The
recipe is then allocated a Data Log Interval and saved.
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Recipe steps are stored in the Step Library list. The list can contain any number of steps,
depending on available hard disk space. When the displayed list is full, it becomes scrollable
to allow you to view all of the list contents.
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To create a new recipe step, use the following procedure:
1) In the Step Library panel, select the NEW button. The Step Edit page is displayed.
2) Enter the step parameters as required, then click on OK. The step is automatically
saved.
Operating Instructions
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mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
To create a recipe step, based on an existing recipe step, use the following procedure:
1) Select a recipe step from the Step Library list, i.e. click on it to highlight it.
2) Select the COPY button. Enter a new step name.
3) Edit the step parameters as required, then click on OK. The new recipe step is
automatically saved.
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To edit an existing recipe, use the following procedure:
1) Select a recipe step from the Step Library list, i.e. click on it to highlight it.
2) In the Step Library panel, click on the Edit button.
3) Edit the step’s process parameters as required, then click on OK. The step is
automatically saved.
NOTE: Changing an existing recipe step will not alter saved recipes, which use the
old version of that step.
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To delete a recipe step, use the following procedure:
1) Select the recipe step from the Step Library list, i.e. click on it to highlight it.
2) Select the DELETE button; the selected recipe step is deleted.
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Recipes are ‘built’ using existing recipe steps, and edited as required.
Within a recipe, steps can be manipulated using the Step Commands pop-up menu
(accessed by clicking on the Recipe Steps field).
Fig 5.4: Step Commands pop-up menu
The Step Commands pop-up menu provides the following options:
Edit Step
Enables the selected (highlighted) step to be edited.
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-22 of 52 Printed: 22-Mar-06, 10:42