Utah-94-721002-System-Manual.pdf - 第172页
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Process Information (Information contained in this document is confidential)
Printed: 08 January 2006 09:37 Page 29 of 30 Issue 1: December 03
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UK
Oxford Instruments Plasma Technolgy
North End, Yatton,
Bristol, BS49 4AP
Tel: +44(0)1934 837000
Fax: +44(0)1934 837001
Email:
plasma.technology@oxinst.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
130A Baker Avenue Extension
Concord, MA 01742
Tel: +1 978 369 9933
Toll Free +1 800-447-4717
Fax: +1 978 369 8287
Email:
info@ma.oxinst.com
Germany
Oxford Instruments GmbH
Otto-von-Guericke Ring 10,
D-65205 Wiesbaden
Tel: +49(0)6122 937161
Fax: +49(0)6122 937175
Email:
plasma@oxford.de
Japan
Oxford Instruments K.K.
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email:
oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People’s Republic of China (Beijing)
Oxford Instruments China
Room 714, Office Tower 3,
Henderson Center,
No. 18 Jianguomennei Ave,
Dongcheng District,
Beijing 100005
Tel: +86 106518 8160/1/2
Fax: +86 106518 8155
Email:
ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
People’s Republic of China
(Shanghai)
Oxford Instruments China
Room 14-F, No.1 Plaza
800 Nanjing East Road
Shanghai 200001
Tel: +86 216360 8530
Fax: +86 216360 8535
Email:
ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Singapore
Oxford Instruments Pte. Ltd
371 Beach Road,
#02-07 Keypoint
Singapore 199597
Tel: +65 6337 6848
Fax: +65 6337 6286
Email:
oipt.sales@oxford-
instruments.com.sg
Taiwan
Oxford Instruments Overseas
Marketing Ltd.
1F, No 23 Jing-Shang 19
th
Street,
Hsinchu, Taiwan
Tel: +65 6337 6848
Fax: +65 6337 6286
Email:
oipt.sales@oxford-
instruments.com.sg
Process Information (Information contained in this document is confidential)
Issue 1: December 03 Page 30 of 30 Printed: 08 January 2006 09:37
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WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
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8.
Uninstallation and Disposal....................................................................................8-1
8.1 About this section ...........................................................................................................8-2
8.2 Uninstalling the system...................................................................................................8-2
8.2.1 General considerations for shutting the system down.........................................8-2
8.2.2 Shutting the system down......................................................................................8-2
8.2.3 Disconnecting the services......................................................................................8-3
8.2.4 Decontamination.....................................................................................................8-4
8.2.5 Dismantling the system components.....................................................................8-4
8.3 Disposal............................................................................................................................8-5
Uninstallation and Disposal
Printed: 25-May-05, 10:18 Page 8-1 of 6 Issue 1: February 00