Utah-94-721002-System-Manual.pdf - 第74页
mä~ëã~ä~Ä póëíÉãNMM lñÑçêÇ =fåëíêìã Éåíë= mä~ëã~ =qÉÅÜåçäçÖó == System Manual RKPKT= póëíÉã=êÉëéçåëÉ=íç=äçëë=çÑ=ëÉêîáÅÉë= This sub-section briefly describes the system’s response to the lo ss of services. bäÉÅíêáÅ~ä= Pro…
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
When power is restored, and it is safe to turn on or restart the system, use the following
procedure:
1) Turn off the machine at the system power off switch.
2) Turn on the machine at the system power on switch. (If a robot arm is fitted, it
should move slowly to its home position.)
3) Turn off the machine at the system power off switch again (see following Note A).
4) Turn on the machine at the system power on switch. (If cassette load lock(s) are
fitted, their elevators will move to find the end positions.)
5) A user with access to the Service Mode can then use the facilities to add wafers to
the mimic page so that the system controller knows where any wafers are.
NOTES:
A) The double on and off routine (in Steps 3 and 4) is essential only for a
system with a Hine robot arm and vacuum cassettes. If the arm has
stopped inside the cassette and both are initialised together, then both
the arm and the cassette contents will be damaged. Therefore the Hine
arm will go to its home position when power is applied, but the
cassettes will initialise ONLY if the Hine arm is already at home position
when power is applied.
B) System and data log files may have been corrupted. Refer to sub-
section 5.9 (page 5-52) for details.
Operating Instructions
Printed: 22-Mar-06, 10:42 Page 5-7 of 52 UC Davis 94-721001 Issue 1: March 06
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
RKPKT= póëíÉã=êÉëéçåëÉ=íç=äçëë=çÑ=ëÉêîáÅÉë=
This sub-section briefly describes the system’s response to the loss of services.
bäÉÅíêáÅ~ä=
Process and pumps stop. Air operated gas and vacuum valves shut. Where the chamber APC
function and main chamber vacuum valve are combined in one unit, it is automatically closed
on loss of electrical power. Load lock wafer transfer valve(s) retain their current state, or
finish their current transition. A Hine arm robot will finish its current movement. Other wafer
transfer devices stop moving immediately. Information on the current process and wafer
position is lost.
Loss of one of three phases: rotary vacuum pump stops. If the phase powering the process
controller remains live then the process aborts, all valves shut but the system controller
retains information on the current state of the machine. If the process controller phase is lost,
then current information is lost.
`çãéêÉëëÉÇ=~áê=
All air operated gas inlet and vacuum valves shut. (Exceptions: air-operated valves with
electrical solenoids unaffected; normally open gas interlock valves open). Gas flows stop and
the chamber is not pumped. Process power(s) are turned off as soon as a flow or pressure
exceeds a tolerance band - normally within 5 seconds. Load lock wafer transfer valve(s) go to
an undefined state. Rotational movement of the air operated 4-way load lock stops.
`ççäáåÖ=ï~íÉê=
Certain components are protected by a water flow switch. If the flow is low, a warning
message is displayed on the PC, and the associated device is turned off.
Leybold dry pumps have their own internal over-temperature switches. Loss of flow for these
pumps will eventually cause a temperature trip causing a process abort (process chamber
pump) and the relevant pump to be switched off. Devices such as turbo pumps have their
own internal protection against overheating and are not protected by external flow switches.
qìêÄçãçäÉÅìä~ê=éìãé=åáíêçÖÉå=éìêÖÉ=
A flow meter monitors the nitrogen purge flow rate downstream of the purge flow
regulator. Low pressure (< 50 sccm) will cause the process to be aborted, all gas and vacuum
valves to shut and PC 2000 will display the alert shown below.
N2 Too Low
mêçÅÉëë=Ö~ëÉë=
Loss of process gas is detected when a mass flow controller goes out of tolerance during
process. The active process devices (normally plasma power) are paused, and gas flows remain
active. The process will resume automatically if gas is restored.
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-8 of 52 Printed: 22-Mar-06, 10:42
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
s~Åììã=éìãéë=
An auxiliary circuit on the pump contactor detects pump failure due to overload or short
circuit, and the process gases are immediately halted.
If a rotary vane or dry vacuum pump stops pumping for other reasons during a process, e.g. if
it fails or its power is disconnected, and the vacuum interlock switch’s contacts remain closed,
process gas will continue to flow into the process chamber. Gas flow will stop when the
chamber pressure exceeds the vacuum switch trip level of 600 mbar absolute. The front-end
software will show the interlock status as ‘fault’.
WARNING
DISCONNECTING THE POWER TO AUXILIARY EQUIPMENT, ESPECIALLY VACUUM
PUMPS, WHILE RUNNING A PROCESS CAN CAUSE A HAZARD IN THE PROCESS
CHAMBER.
ENSURE THAT THE SYSTEM IS SHUT DOWN USING THE PROCEDURE GIVEN IN SUB-
SECTION 5.3.5 BEFORE DISCONNECTING ANY POWER CABLES FROM THE POWER
BOX, OR SWITCHING OFF ANY ELECTRICAL SUPPLIES TO AUXILIARY EQUIPMENT.
WARNING
IF THE EQUIPMENT HALTS DURING PROCESS BECAUSE THE VACUUM SWITCH HAS
OPENED, THERE MAY BE A SERIOUS GAS HAZARD IN THE CHAMBER AND PUMPING
LINES.
ASSESS THE RISKS BEFORE TRYING TO PUMP OR VENT THE CHAMBER.
PERSONAL PROTECTIVE EQUIPMENT MAY BE NECESSARY.
Operating Instructions
Printed: 22-Mar-06, 10:42 Page 5-9 of 52 UC Davis 94-721001 Issue 1: March 06