Utah-94-721002-System-Manual.pdf - 第259页

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WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

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Vacuum Check

Weekly, or as dictated by process constraints, perform a system vacuum check, recording:

a) The base pressure after a standard pumping time.

b) The rate of pressure rise in an isolated system.

Experience suggests that the O-ring seals at each end of the ICP dielectric tube are the most likely source

of leaks in a new or freshly reassembled ICP180, but once sealed the source remains leak tight unless an

O-ring seal fails. The design minimises exposure of the seals to the plasma, but tolerances in the tube

construction (especially of quartz tubes) may mean the tube is not automatically

concentric with the O-

ring seals. This will reduce O-ring seal life, and require more care in assembly to obtain a good vacuum

seal.

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Water cooling circuit

1) Turn off the RF supply, then vent the ICP180 source.

2) Open the RF enclosure and automatch, then inspect the fluid cooling path carefully for signs

of leaks, blockage, corrosion, overheating or melting of plastic pipes.

3) Repair or replace any defective sections.

4) Pay attention to the layout of the cooling pipes: the design provides for minimum clearances

between a water-cooled RF live component and the first point a plastic pipe rests against a

grounded surface.

5) Ensure that the cooling flow rate is at least 2 litres/minute in the

inch circuit and at least

1 litre/minute in the ¼ inch circuit.

6) Check the function of any water flow switches in the cooling path.

RF enclosure exhaust flow

1) Turn off the RF supply, then vent the ICP180 source.

2) Open the RF enclosure.

3) Remove any accumulations of dust or particles from the exhaust port and air inlet holes.

4) Wipe down the outside of the ICP dielectric tube and the RF coil to remove any material

which may eventually lead to an RF arc.

RF emissions

1) Check that the RF emissions are within specification. See Appendix A in the mä~ëã~ä~Ä

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ICP 180 Source

Issue 4: January 06 Page 18 of 26 Printed: 18-Jan-06, 8:44

Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=f`m=NUM=

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

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This sub-section applies to ICP180 second series builds (‘floating top’ version) with the following part

numbers:

100-6-54 ICP 180-FLOAT.TOP ASY(QUARTZ)

100-6-54/1 ICP180-FLOAT.TOP-ANOD.(QUARTZ)

100-6-55 ICP180-FL0.TOP ANG.VP(QUARTZ)

100-6-55/1 ICP180-FL.TOP-AN.VP-ANOD QU'TZ

100-6-56 ICP180 FLOAT TOP ASSY ALUMINA

100-6-56/1 ICP180 FLOAT TOP ASY ANOD ALUM

100-6-57 ICP180FLO.TOP ANG V/P(ALUMINA)

100-6-57/1 ICP180 FLO.TOP V/P ANOD ALUM.

Refer to assembly drawing MA00A23815

These instructions are given to assist personnel who are skilled in the maintenance of vacuum process

equipment. The task includes operating the vacuum equipment and mechanical assembly. There is some

lifting from the top of the equipment which may be easier with two persons.

Parts required:

MD00C18541 QUARTZ TUBE (ICP SOURCE)

MD00C18542 ALUMINA TUBE (ICP SOURCE)

G/SEL/O-K/264 KALREZ O'RING BS 264 X2

G/GAS/FIT/614C ¼ INCH VCR GASKET X1

Safety

Risks associated with this procedure include:

• Toxic gas. Pump the system long enough to reduce residual toxic gases to an acceptable

level. If halogen gases have been used in the chamber, run a plasma clean (1 hour 10

mTorr O2 50 sccm, 1000W ICP, 50 W bias or similar process) then pump for at least one

hour. Follow local practice concerning risk assessment and personal protective equipment.

OIPT practice is to use chemical filter masks when working on halogen process chambers.

• Glass splinters. Quartz tubes may have sharp edges. Damaged tubes make leave glass

splinters. Take due care.

• Implosion. There is a small risk of catastrophic tube failure, especially the first time it is

put under vacuum. Put the shielding in place before pumping the system. Always vent the

system before removing the covers.

• RF radiation. The ICP180 coil is connected to a high power RF source which can cause

burns or interfere with other equipment. Make sure the RF generator is switched off

before removing any covers. After completing the following procedure, perform an RF

leakage test as detailed in Appendix A of this system manual.

ICP 180 Source

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mä~ëã~ä~Ä=f`m=NUM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== Equipment Manual=

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

Procedure

1) Clean and pump the process chamber as recommended above

2) Vent the chamber

3) If an endpoint camera is fitted, remove the camera

4) Remove the outer cover of the ICP180

5) Disconnect the ¼ inch VCR joint feeding gas into the top of the ICP180

6) Free the water cooling tubes or turn off the water and disconnect the tubes to allow the

ICP180 top vacuum lid to be removed

7) Undo the 6 bolts securing the top vacuum lid and remove the lid, exposing the dielectric tube

8) It will probably be necessary to open one or more of the inner RF shielding panels to gain

access to the cooling clamps at the top and bottom of the ICP dielectric tube. Slacken the

cooling clamps until it is possible to withdraw the old ICP tube.

Notes:

a) The tube may stick to the lower vacuum O-ring.

b) It should not be necessary to remove the electrostatic screen when changing

the tube.

9) Clean the lower and upper O-ring seal areas thoroughly: take care to remove any sharp

particles.

10) Inspect and if necessary replace the upper and lower O-ring seals

11) Inspect the new ICP tube for defects, especially chips or cracks at the vacuum sealing faces. Do

not install a damaged tube.

12) Install the tube.

13) Tighten the cooling clamps. Do not use excessive force. The lower clamp should be firm, and

the upper clamp should be much looser. This allows the electrostatic shield to move freely

upwards by thermal expansion. The electrostatic screen must not be bowed out too much.

Keep a clearance of at least 12 mm between the screen and the RF coil.

14) Reassemble the ICP 180 source

15) When the outer cover is in place, pump down and perform a leak check.

16) Perform an RF leakage test. See Appendix A of your Plasmalab system manual for details.

17) Dispose of the old tube in accordance with local regulations.

ICP 180 Source

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