Utah-94-721002-System-Manual.pdf - 第39页
System Manual lñÑçêÇ=få ëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ Ä póëíÉã=NMM PKPKN= cê~ãÉ= The frame is constructed from steel with removable access pan els. Casters and adjustable feet fitted to the bottom of the frame e…
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The mä~ëã~ä~Ä
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póëíÉã=NMM=is a modular plasma processing system. It can be configured to
carry out Reactive Ion Etching (RIE), Plasma Enhanced Chemical Vapour Deposition (PECVD),
Inductively Coupled Plasma (ICP) and Electron Cyclotron Resonance (ECR) processes.
The system can be tailored to suit different rates of throughput using transfer and load lock
chambers with manual or automatic loading.
Combinations of processes can be achieved by using a transfer chamber robot to serve up to
four process chambers.
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The system is controlled and monitored by a PC compatible computer with a Microsoft
Windows Operating System. The computer is fitted with a floppy disk drive and a CD-ROM
drive to allow software updates. An Arcnet interface card, for communicating with the
Programmable Logic Controllers (PLCs), is fitted in one of the expansion slots. If required, a
modem can be fitted to use the ‘PC Anywhere’ software.
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The PC 2000 control software runs as a Windows-based application allowing multiple levels of
system control: SYSTEMS MANAGER, SYSTEMS ENGINEER, PROCESS DEVELOPER,
MAINTENANCE ENGINEER, PROCESS EDITOR and OPERATOR, all of which are accessed by
password entry.
The system status is displayed on graphic mimic diagrams with all operational parameters and
status displays accessible through pop-up windows selected using the mouse. All the major
process parameters are accessible from the recipe and process step set-up pages, including
definition of gases on each line and calculation of mass flow settings in sccm's. The software
includes data logging to disk of user-selectable run-time process parameters for off-line
verification and analysis of process conditions.
Processing recipes can be formulated and stored in the computer and the system can be run
in fully automatic mode using the recipes. Alternatively, the system can be run in the manual
mode with each phase of the process controlled and initiated separately. All the parameters
can be monitored in real time using the PC 2000 software.
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The mä~ëã~ä~Ä
póëíÉã=NMM process module base unit houses the process chamber, electronic
sub systems, control units, services and power supplies.
The module is mechanically MESC compatible and is constructed using proven Oxford
Instruments Plasma Technology hardware designs.
The system is fully interlocked to protect the system hardware from service failure and to
protect the operator from electrical shock during maintenance procedures. A lock out valve
and associated padlock, mounted on the frame, can be used to prevent operation of all
pneumatically operated devices during servicing.
Description
UC Davis 94-721001 Issue 1: March 06 Page 3-2 of 22 Printed: 22-Mar-06, 7:29
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉã=NMM
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The frame is constructed from steel with removable access panels. Casters and adjustable feet
fitted to the bottom of the frame enable it to be easily manoeuvred, then levelled and locked
into position.
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The power box assembly is mounted on the outside of the frame. This distributes mains
power to the +24V and ±15V power supply unit, the frame mounted electrical units and the
remote auxiliary units. For circuit details of the unit, refer to the relevant drawing in Volume
2 of this manual.
A 24V EMO (Emergency Off) circuit connects all the EMO buttons mounted externally on the
machine. If any of these EMO buttons are pressed in, all the power outputs from the power
supply boxes are disabled.
NOTE: Freestanding auxiliary units such as water recirculators, Residual Gas Analysers, and
the system control PC, are
not powered via the base unit power box. These require
dedicated electrical service points. These accessories remain live when the system
EMO is pressed.
If it is required that all accessories are powered off when the EMO is pressed, the user must
supply a power distribution unit with outlets for the accessories, and contact the factory for
electrical access to the machine EMO circuit.
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The system is controlled from a remote IBM compatible PC computer terminal using Oxford
Instruments Plasma Technology's 'PC 2000' software via a Programmable Logic Controller
(PLC) housed in the console cabinet. See Fig 3.1.
Description
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mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
Fig 3.1: Typical control system
The system may be run from the PC terminal in manual mode, that is using direct 'real time'
control over the process, or in automatic mode where the system performs the entire process
according to previously entered recipes. The extensive Oxford Instruments Plasma Technology
process library supports all mä~ëã~ä~Ä
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póëíÉã=NMM=configurations. A full description of the 'PC
2000' control instructions is provided in Section 5.
For details of the control wiring, see the relevant drawings in Volume 2 of this manual.
Description
UC Davis 94-721001 Issue 1: March 06 Page 3-4 of 22 Printed: 22-Mar-06, 7:29