Utah-94-721002-System-Manual.pdf - 第333页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 Pumping Pipework UKO= OMMãã=éáéÉïçêâ=H=OMM=s^q=^m`=ENMMJUJOMF= N 2 1 Bypass not always fitted - see s…
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Pumping Pipework Issue 2: November 02
UKN= dÉåÉê~ä=
A key to the symbols used to represent vacuum system components in the following illustrations is shown in the following
key; where no symbol exists for a component, it is either labelled or can be identified from the associated table.
Key to vacuum schematic symbols
Section 8 Page 2 of 6
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Pumping Pipework
UKO= OMMãã=éáéÉïçêâ=H=OMM=s^q=^m`=ENMMJUJOMF=
N
2
1
Bypass not
always fitted-
see system
for exact
configuration
PROCESS CHAMBER
N
2
N
2
V
ACUUM
SWITCH
TURBOMOLECULAR
PUMP CONTROLLER
ROTARY
VANE PUMP
A
PC
CONTROLLER
1
13
12
12
15
19
12
12
14
14
12
1
2
3
3
4
5
6
7
8
9
10
11
16
17
18
15
20
14
TURBO
BACKING/
PURGE VALVE
CHAMBER
ROUGHING
VALVE
3
Printed: 16-Jan-06, 15:55
Section 8 Page 3 of 6
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Pumping Pipework Issue 2: November 02
Item No. in
illustration
OIPT Part Number Description
1 GVV00012C N2 VENT VALVES
2 G/VAC/SUN/032 EDWARDS VAC INTERLOCK SWITCH
3 G/VAC/VLV/125 PV25PK ISOLATION VALVE
4 M/MTR/MFM/003 MKS 100SCCM N2 FLOW METER SWAG
5 G/VAC/VLV/245 200ISO STEPGATE VALVE.64046-PE52
6 G/VAC/VLV/246 VAT APC CONTROLLER 641PM-16PM
7 G/VAC/PMP535 ALCATEL ATP900HPC TURBO ISO200
8 G/VAC/PMP/536 ALCATEL ACT100T TURBO CONTROLLER
9 G/VAC/GGE/004 ACT.INVERT.MAG.GGE.AIM-S-NW25 (PENNING UNIT)
10 G/VAC/GGE/625 100mT MKS CAPACITIVE MANOMETER 628B.1T-D-E-1-B
11 G/SEL/O-V/371 5.3 x 215.3 mm VITON 'O' RING BS 371
12 G/VAC/SEL/025C NW25 CENTRING RING ALI/VITON
12a G/VAC/CLP/025C NW25 CLAMP RING
13 G/VAC/SEL/010C NW10 CENTRING RING ALI/VITON
13a G/VAC/CLP/010C NW10 CLAMP RING
14 G/VAC/SEL/040C NW40 CENTRING RING ALI/VITON
14a G/VAC/CLP/040C NW40 CLAMP RING
15 G/VAC/SEL/080 200ISO-K CENTRING RING ALI/VITON
16 G/VAC/FIT/280 ISO 200 - 200 TEE
17 G/VAC/FIT/240C NW40 TEE
18 G/VAC/FLX/325 NW25 0.5M PIPE
19 G/VAC/FIT/004C NW25/NW16 REDUCER C105-14-447
20 G/VAC/FIT/005C NW40/NW25 REDUCER
Section 8 Page 4 of 6
Printed: 16-Jan-06, 15:55