Utah-94-721002-System-Manual.pdf - 第263页
Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä= f`m=NUM= WARNING BEFORE PROCEEDING WITH A NY MAINTENANCE WOR K, READ SECTION 1 - HEALTH AND SA FETY . 5) Refit the automatch covers. TKP= eáÖÜ=êÉÑäÉÅíÉÇ=…
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WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
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WARNING
WHEN CARRYING OUT THE FOLLOWING PROCEDURES, CONTINUOUSLY MONITOR
THE RF EMISSIONS AS DETAILED IN APPENDIX A. ON COMPLETION OF ALL TESTS,
MEASURE THE RF EMISSIONS TO ENSURE THAT THEY ARE WITHIN SAFE LIMITS AS
SPECIFIED IN APPENDIX A.
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NOTE: The following text refers to systems fitted with an Automatch Unit manual
adjustment panel. For systems having software control of the Automatch Unit, refer
to Section 5 (Operating Instructions) of your system manual and the Automatch
Unit’s Equipment Manual.
If the indicated reflected power shown on the RF generator during processing is greater than 10% of the
indicated forward power it is necessary to carry out the following checks.
1) Check that the 24VDC supply to the automatch is present.
2) Check that the 24VDC fuse, located on the AMU main PCB, is OK.
3) If the capacitors have driven to their end stops or settled distant from a good match, set both
AUTO/MANUAL switches to MANUAL.
4) Operate the C1 MIN/MAX switch until the indicated reflected power reduces.
5) Operate the C2 MIN/MAX switch to further reduce the indicated reflected power.
6) Continue to operate both MIN/MAX switches until the minimum indicated reflected power is
obtained.
7) Set both AUTO/MANUAL switches to AUTO.
If it is not possible to obtain a reduction of indicated reflected power, check the mechanical drives to the
capacitors as follows:
1) Switch off the RF power.
2) Remove the automatch covers.
3) Set both AUTO/MANUAL switches to MANUAL.
4) Use the MIN/MAX switches to drive each capacitor to both of its end stops (approximately 15
turns of spindle rotation between end stops). While the spindles are rotating, look for
slipping of the capacitor shafts and for the mechanical coupling becoming disengaged. If
required, re-engage the coupling and tighten the coupling screws. Verify that the electrical
end stops limit capacitor adjustment within the mechanical alignment range. CARE:
Approach the mechanical limits slowly, turning by hand. Driving hard past a mechanical limit
can damage a capacitor.
NOTE:
Capacitor spindle rotation clockwise decreases capacitance viewed from the drive
motor side.
ICP 180 Source
Issue 4: January 06 Page 22 of 26 Printed: 18-Jan-06, 8:44
Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=f`m=NUM=
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
5) Refit the automatch covers.
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1) Evacuate the process chamber. Set up a flow of gas to give a pressure in the range 1Pa to 3 Pa
(7 mTorr to 22 mTorr).
2) Set the ICP 180 RF forward power to 100W. Check the reflected power. Depending on the
reflected power reading, proceed as follows:
a) If the reflected RF power is < 2% of the forward RF power, the automatch is tuned
correctly and ready for processing.
b) If the reflected RF power is > 5% of the forward RF power, carry out the procedure in
sub-section 7.3.1.
c) If the reflected RF power is greater than 2% and less than 5% of the forward RF
power, carry out the procedure in sub-section 7.3.2.
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WARNING
THE FOLLOWING PROCEDURE INVOLVES WORKING CLOSE TO EXPOSED LIVE RF
CONDUCTORS AND MUST ONLY BE CARRIED OUT BY SKILLED PERSONNEL WHO ARE
FULLY TRAINED AND AWARE OF THE POTENTIAL HAZARDS.
NOTE: The following text refers to systems fitted with an Automatch Unit manual
adjustment panel. For systems having software control of the Automatch Unit, refer
to Section 5 (Operating Instructions) of your system manual and the Automatch
Unit’s Equipment Manual.
1) Turn off the RF supply.
2) Open the automatch cover to reveal the automatch PCB (see Fig 6).
3) Turn on the ICP 180 RF supply at 50W, monitor the RF power level in the working area
continuously.
4) Set both Auto/Manual switches to MANUAL. Operate both MIN/MAX switches to obtain the
lowest possible reflected power.
5) Refer to Fig 6 ( page 25). Measure the DC voltages On the ‘Automatch PCB’, test point TP10
and TP110. These are monitoring points for the error signals which drive the variable
capacitors. (0 to10V range). Adjust the potentiometers RV1 and RV2 iteratively until both
voltages are as close as possible to zero volts.
6) Set both Auto/Manual switches to AUTO; the reflected power should remain low.
7) Replace the RF covers. Increase the ICP 180 RF power to 500W. If the reflected power rises
above 50W, carry out the procedure in sub-section 7.3.2.
ICP 180 Source
Printed: 18-Jan-06, 8:44 Page 23 of 26 Issue 4: January 06
mä~ëã~ä~Ä=f`m=NUM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== Equipment Manual=
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
=
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1) Ensure that the automatch covers are securely fitted and that both Auto/Manual switches are
set to AUTO.
2) Switch on the ICP RF supply, then set the forward power to 500W.
3) Observe the reflected power. Adjust error signal potentiometer RV1 by about one turn each
way. The capacitors will adjust automatically in response: find the lowest reflected power
point.
4) Adjust error signal potentiometer RV2 by about one turn each way. The capacitors will adjust
automatically in response: find the lowest reflected power point.
5) Repeat Steps 3) and 4) until the best match in obtained; <2% reflected power should be
possible.
6) Increase the RF power to 1000W and if required, repeat Steps 3) to 5).
7) SAFETY Always measure the RF radiation during and after adjustments to the automatch.
ICP 180 Source
Issue 4: January 06 Page 24 of 26 Printed: 18-Jan-06, 8:44