Utah-94-721002-System-Manual.pdf - 第323页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 RF Supplies and Automatch f`mNUM=cil^q=qlm=^ppvK=^irjfk^=ENMMJSJRSF= OIPT Part No. Description L/GEN/…

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Illustrated Parts Catalogue
RF Supplies and Automatch Issue 2: November 02
Section 6 Page 4 of 8
Printed: 16-Jan-06, 15:55
ICP180 AUTOMATCH ASSEMBLY EXTERNAL VIEW
(1) Trimpots
100k (2 off)
(3) RF inlet
(4) DC motor and
gearbox assy
(5) AMU Control PCB
(7) Fan Finger Guard
(6) Fan
(2) Capacitive
feed through
(4 off)
ICP180 AUTOMATCH ASSEMBLY INTERNAL VIEW
(8) 1000pf
vacuum capacitor
(9) 500pf
vacuum capacitor
(17) Modified
gear
(19) PTFE tube
(10) Cooling ring
assembly
(13) AMU sense PCB
(14) Ferrite cube
(16) Insulator
(15) Conductor
(inside insulator)
(18) 1000pf capacitor
drive adaptor
(11) 500pf
capacitor insulator
(12) RF outlet mount

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 RF Supplies and Automatch
f`mNUM=cil^q=qlm=^ppvK=^irjfk^=ENMMJSJRSF=
OIPT Part No. Description
L/GEN/RFG/104 AE RFG3001 208V 3ph (BLACK BOX) RF GENERATOR
MA00Z23828 AUTOMATCH ASSEMBLY
MA00B23328 AMU CONTROL PANEL ASSY
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Item OIPT Part No. Qty Description
1 ERU0511 2 TRIMPOT 100K (3006) SERIES
2 ECC0001 4 CAPACITIVE FEED THRU 10,000 pf
3 EPP0005 1 SOCKET G15007H RR N CHAS. (RF INLET)
4 MA00D23738 2 MOTOR & GEARBOX ASSEMBLY
5 MA00Z20138 1 AMU CONTROL PCB ASSY
6 EFA0460C 3 FAN AXIAL 60 x 60 x 25.4 24 Vdc
7 EFA1062 3 FAN FINGER GUARD 60/62
8 L/CAP/VAR/110 1 VACUUM CAPACITOR 1000pf
9 L/CAP/VAR/106 1 VACUUM CAPACITOR 500pf
10 MA00D23772 1 COOLING RING ASSEMBLY
11 MD00D21224 1 500pf VACUUM CAPACITOR INSULATOR
12 MD00D19398 1 RF OUTLET MOUNT
13 MA00Z18209 1 AMU SENSE PCB ASSY
14 ELZ0015C 2 FERRITE CUBE FX-3854
15 MD00D21243 1 CONDUCTOR
16 MD00D21242 1 INSULATOR
17 MD00D22225 2 MODIFIED GEAR
18 MD00D21224 1 1000pf VACUUM CAPACITOR DRIVE ADAPTOR
19 R/TUB/PTF/030 ¼" ODX x 3/16" ID PTFE TUBE
Printed: 16-Jan-06, 15:55
Section 6 Page 5 of 8

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
RF Supplies and Automatch Issue 2: November 02
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(1) Sw1
(1) Sw5
A
MU CONTROL PANEL ASSY
Note - AMU control panel PCB assy - attached to rear of panel
Item OIPT Part No. Qty Description
1 EST3102C 2 SW1, SW5
2 EST1122C 4 SW2, SW3, SW6, SW7
3 EDM0200 2 LCD1, LCD2
4 ERU0417C 4 RV1, RV2, RV3, RV4
5 ESM0111 1 SW4
6 EST3204 1 SW8
7 MA00Z23250 1 OPT AMU CONTROL PANEL PCB ASSY
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Section 6 Page 6 of 8
Printed: 16-Jan-06, 15:55