Utah-94-721002-System-Manual.pdf - 第32页

mä~ëã~ä~Ä= póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual OKN= dÉåÉê~ä= The services requirements for the mä~ëã~ä~Ä= póëíÉã=NMM= are given in two appendices to this manual: Appendix S Services Specificat…

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=póëíÉã=NMM

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Services (ICP 180 & automatic load lock) ...................................................................................2-1

2.1 General....................................................................................................................................................2-2

2.2 Services requirements ............................................................................................................................2-3

2.3 Distribution and use of Nitrogen vent and turbo purge gas..............................................................2-3

2.4 Services diagrams ...................................................................................................................................2-4

Fig 2.1: System 100 (ICP 180/380) services flow diagram..................................................................................2-5

Fig 2.2: System 100 pneumatic circuit diagram.................................................................................................2-6

Services (ICP 180 and Automatic Load Lock)

Printed 25 May 2005 10:12 Page 2-1 of 6 Issue 2: February 02

mä~ëã~ä~Ä=póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

OKN= dÉåÉê~ä=

The services requirements for the mä~ëã~ä~Ä=póëíÉã=NMM=are given in two appendices to this

manual:

Appendix S Services Specifications for mä~ëã~ä~Ä=and fçåÑ~Ä Systems. This document

gives generic information and mandatory requirements for all services.

Appendix I mä~ëã~ä~Ä=póëíÉã=NMM Installation Data Sheets. This document gives the

information necessary to prepare the environment for the mä~ëã~ä~Ä=

póëíÉã=NMMK= Services information includes electrical power consumption

and cooling water flow rates. References are made to the relevant

mandatory services requirements, listed in ‘Services Specifications for

mä~ëã~ä~Ä=and fçåÑ~Ä Systems’ (see Appendix S).

Services diagrams of the mä~ëã~ä~Ä=póëíÉã=NMM=(ICP 180 + automatic load lock) are given in

the following drawings:

SP91C24171 System 100 (ICP 180) Services flow diagram

SP91B24018 System 100 Pneumatic circuit

These drawings are located in Volume 2 of this manual. Illustrations of these drawings are

also given in sub-section 2.4, page 2-4.

Services (ICP 180 and Automatic Load Lock)

Issue 2: February 02 Page 2-2 of 6 Printed 25 May 2005 10:12

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=póëíÉã=NMM

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For details of the services requirements, refer to Appendix IDS and Appendix S.

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Nitrogen (N

) is supplied to the system via the services panel to allow the process chamber,

foreline and automatic load lock to be filled during system venting and to provide a purge

gas supply to the turbo pump (if fitted). The N

distribution circuit is shown in the services

flow diagram; see the following paragraph.

The services flow diagram of the mä~ëã~ä~ÄpóëíÉã=NMM=(ICP 180)=are given in drawing 94-

SP91C24171. This drawing is located in Volume 2 of this manual. An Illustration of this

drawing is also given at the rear of this Section.

Nitrogen enters the system at the services panel through a ¼” Swagelok bulkhead connector.

It is then fed to a regulator and pressure gauge (located behind a panel to prevent

unauthorized adjustment) via a stainless steel pipe. The outlet pressure of the regulator can

be manually adjusted. To set up the outlet pressure of the regulator, refer to ‘Operator

Adjustments’ in Section 5.

The outlet from the regulator is connected to:

a) A check valve (over-pressure relief valve).

b) The turbo pump purge line (if a turbo pump is fitted).

c) If a Maglev turbo pump is fitted, directly to the turbo pump (for use by the Alcatel

turbo controller during system venting).

d) The process chamber vent line.

e) The foreline vent line.

f) The automatic load lock vent line.

`ÜÉÅâ=î~äîÉ=

The check valve is installed to limit the maximum pressure that the regulator can supply. The

valve is normally closed and will open at pressures above 5 psi. The outlet of the check valve is

fed to the air out connector on the services panel to allow any excess nitrogen to be piped

out of the cleanroom if required.

WARNING

IN A NORMALLY VENTED ROOM, THERE IS A LOW RISK OF ASPHYXIA DUE TO VENT

GAS DISPLACING AIR.

USERS SHOULD MAKE THEIR OWN RISK ASSESSMENT.

DO NOT REMOVE THE CHECK VALVE OR CAP THE AIR OUT CONNECTOR; THIS WOULD

COMPROMISE A SYSTEM SAFETY FEATURE.

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The turbo purge line supplies nitrogen to the turbo pump purge gas inlet via a mass flow

meter, restrictor and the turbo purge valve. The mass flow meter’s readback is monitored by

the PC 2000 software. If the nitrogen flow is too low, this state is detected by the PC 2000

Services (ICP 180 and Automatic Load Lock)

Printed 25 May 2005 10:12 Page 2-3 of 6 Issue 2: February 02