Utah-94-721002-System-Manual.pdf - 第60页
mä~ëã~ä~Ä = póëíÉã=NMM= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= System Manual QKN= fåíêçÇìÅíáçå= The installation and cabling of this system is the responsibility of the customer (unless this has been specifically altered …
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4.
Installation and commissioning.............................................................................4-1
4.1 Introduction.....................................................................................................................4-2
4.2 Installing the system........................................................................................................4-2
4.2.1 Unpacking................................................................................................................4-2
4.2.2 Positioning the system components.......................................................................4-3
4.2.3 Connecting the services...........................................................................................4-4
4.3 Commissioning the system .............................................................................................4-6
4.4 System adjustments.........................................................................................................4-6
4.4.1 Heater/Chillers .........................................................................................................4-6
4.4.2 Process pump purge................................................................................................4-6
Fig 4.1: 3-phase supply cable connections at the power box.................................................4-5
Installation and Commissioning
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The installation and cabling of this system is the responsibility of the customer (unless this has
been specifically altered in the sales contract). On completion of the system installation,
Oxford Instruments Plasma Technology (OIPT) will commission the system.
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The following instructions are a general guide for installing a typical mä~ëã~ä~ÄpóëíÉãNMM=
system, supplied with a remote gas pod and rotary vane pump. Customers should be aware of
any special requirements for their specific system, e.g. rotary pump purging, hazardous
processes, endpoint detectors etc..
For details of the services required, refer to the Installation Data Sheets and the Services
Specifications documents included in this manual as Appendices.
IMPORTANT: BEFORE INSTALLING THE SYSTEM, ENSURE THAT ALL PERSONNEL WHO
WILL BE INVOLVED HAVE READ AND UNDERSTOOD SECTION 1 ‘HEALTH
AND SAFETY’ OF THIS MANUAL.
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Unpack system components and check for damage and missing items against the packing list.
If any items are damaged or missing, report immediately to the carrier and OIPT.
Installation and Commissioning
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WARNING
LIFTING HEAVY OBJECTS INCORRECTLY CAN CAUSE SEVERE INJURY
When handling heavy system components such as the system unit or
vacuum pumps, ensure that the appropriate lifting equipment,
operated by fully trained personnel, is used.
When heavy rack-mounted components are handled, ensure that the
weight is safely distributed between sufficient personnel.
WARNING
TOPPLING (TIPOVER) HAZARD - SOME SYSTEM COMPONENTS, E.G.
ROBOTIC HANDLERS AND AUTOMATIC LOAD LOCKS / TRANSFER
CHAMBERS (ESPECIALLY IF FITTED WITH CASSETTE LOAD LOCKS) CAN
TOPPLE CAUSING SEVERE INJURY.
When transporting or manoeuvring the system frames, robotic
handlers etc., ensure that they remain vertical at all times and use the
appropriate lifting / handling equipment.
Ensure that any support frames, supplied with the system, are
correctly fitted whenever the system is transported / manoeuvred or
dismantled for service / maintenance.
It is entirely the user’s responsibility to ensure that all components are
supported safely before and during any transporting, manoeuvring or
maintenance operations. Support frames provided by Oxford
Instruments Plasma Technology are not necessarily adequate for any
such operations. The absence of a support frame must not be taken as
an indication that no further precautions need to be made before such
operations are undertaken.
1) Transport the system frames to the clean room, then position them in the required
location. Level the system frames (ensuring that the wafer transfer path is aligned
from frame to frame) using the adjustable feet, then lock the feet.
OIPT recommends that at least 600mm service access space is allowed
between any obstacle (e.g. walls, partitions, etc.) and serviceable items,
e.g. the power distribution unit.
2) Transport the system PC to the clean room and position it in the required location.
3) Transport the gas pod to the grey area and mount it in the required position.
IMPORTANT OIPT gas pods typically weigh >40kg. If you intend fixing
your gas pod to a wall, ensure the wall and gas pod fixings
are sturdy enough to bear at least four times the weight of
the gas pod. Periodically, e.g. annually, check the gas pod
and its fixings are secure.
Installation and Commissioning
Printed: 16 March 2006 11:59 Page 4-3 of 8 Issue 4: March 05