3OM-996-005.pdf - 第102页

Fiducial mark #3 Mark # Set the mark code of the third fiducial mark in the text box. Refer to "(A03) P .E.C. Recognition Mark Data" for the mark codes. 1 Fiducial mark #3 Mark # Fig. 3B57 0305-001 2-33 AIM01ED…

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P.E.C. recognition mode local
When "Enable" is set in the "P.E.C. recognition function" text box,
select one of the following options in the "P.E.C. recognition mode
local" text box.
Disable : The local recognition function is not used.
Enable : The local recognition function is used.
(A02_02) P.E.C. recognition mode global
When "1 Point", "2 Point", "3 Point" or "4 Point" is selected for the
global P.E.C. recognition function, the coordinates and code of each
fiducial mark must be entered in the corresponding text boxes.
Fiducial mark #1 X location [mm] and Y location [mm]
Set the coordinates of the first fiducial mark in the text boxes.
Unit: mm
Fiducial mark #1 Mark #
Set the mark code of the first fiducial mark in the text box.
Fiducial mark #2 X location [mm] and Y location [mm]
Set the coordinates of the second fiducial mark in the text boxes.
Unit: mm
Fiducial mark #2 Mark #
Set the mark code of the second fiducial mark in the text box.
Fiducial mark #3 X location [mm] and Y location [mm]
Set the coordinates of the third fiducial mark in the text boxes.
Unit: mm
2.3 Operation Data
1
Fiducial mark #1 Mark #
Fig. 3B53
Fig. 3B54
Fiducial mark #2 X location [mm]
Fiducial mark #2 Y location [mm]
100.000 [mm]
100.000 [mm]
1
Fiducial mark #2 Mark #
Fig. 3B55
Fig. 3B52
Fiducial mark #1 X location [mm]
Fiducial mark #1 Y location [mm]
10.000 [mm]
10.000 [mm]
0305-001 2-32 AIM01EDTP
Disable
P.E.C. recognition mode local
Fig. 3B51
Fig. 3B56
Fiducial mark #3 X location [mm]
Fiducial mark #3 Y location [mm]
0.000 [mm]
0.000 [mm]
Fiducial mark #3 Mark #
Set the mark code of the third fiducial mark in the text box.
Refer to "(A03) P.E.C. Recognition Mark Data" for the mark codes.
1
Fiducial mark #3 Mark #
Fig. 3B57
0305-001 2-33 AIM01EDTP
2.3 Operation Data
Note
(A03) P.E.C. Recognition Mark Data
Fig. 3B58 Edit Window (Example)
(A03_01) Mark #
The mark Nos. correspond to the mark codes and the specified pa-
rameters of each fiducial mark used in the P.E.C. recognition function.
10 types of mark codes can be registered for each pattern program.
0305-001 2-34
AIM01EDTP
2.3 Operation Data
1
mark #
Fig. 3B59