SM-131-006.pdf - 第44页

Contents Page Cont-5 Chapter 5 Head Section 1. Replacement of Head Unit ............................................................. 5- 1 1. 1 Detachment of Head Unit ....................................................…

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Contents
Page
Cont-4
Chapter 4 Beam Section
1. Replacement of X-Axis Motor Stator and Rotor .............................4- 1
1.1 Detachment of X-Axis Motor Stator .........................................4- 1
1.2 Detachment of X-Axis Motor Rotor ..........................................4- 1
1.3 Attachment of X-Axis Motor Stator and Rotor..........................4- 2
1.4 Adjustment and Teaching Operations Required after Work ....4- 2
2. Replacement of Y-Axis Motor Stator and Rotor .............................4- 3
2.1 Detachment of Y-Axis Motor Stators .......................................4- 3
2.2 Detachment of Y-Axis Motor Rotors ........................................4- 3
2.3 Attachment of Y-Axis Motor Stators and Rotors ......................4- 4
2.4 Adjustment and Teaching Operations
Required after Replacement .......................................... 4- 4
3. Replacement of Servoamplifier......................................................4- 5
3.1 Detachment of Servoamplifiers ...............................................4- 5
3.2 Attachment of Servoamplifiers ................................................4- 5
4. Replacement and Adjustment of X-Axis Encoder ..........................4- 6
4.1 Detachment of X-Axis Encoder ...............................................4- 6
4.2 Attachment of X-Axis Encoder ................................................4- 6
5. Replacement and Adjustment of Y-Axis Encoder ..........................4- 8
5.1 Detachment of Y-Axis Encoder ...............................................4- 8
5.2 Attachment of Y-Axis Encoder ................................................4- 8
6. Replace of Linear Scale .................................................................4- 10
6.1 Replacement of X-Axis Linear Scale .......................................4- 10
6.1.1 Detachment of X-Axis Linear Scale ................................4- 10
6.1.2 Attachment of X-Axis Linear Scale ..................................4- 10
6.1.3 Attachment of X-Axis Linear Scale Holder ......................4- 11
6.2 Replacement of Y-Axis Linear Scale .......................................4- 12
6.2.1 Detachment of Y-Axis Linear Scale ................................4- 12
6.2.2 Attachment of Y-Axis Linear Scale ..................................4- 12
6.2.3 Attachment of Y-Axis Linear Scale Holder ......................4- 13
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Contents
Page
Cont-5
Chapter 5 Head Section
1. Replacement of Head Unit ............................................................. 5- 1
1.1 Detachment of Head Unit ........................................................5- 1
1.1.1 Disconnection of Head Cover Wires...............................5- 1
1.1.2 Detachment of Head Unit ................................................5- 2
1.2 Attachment of Head Unit..........................................................5- 2
1.2.1 Attachment of Head Unit .................................................5- 2
1.2.2 Connection of Head Cover Wires ...................................5- 2
1.3 Operation Check .....................................................................5- 3
1.4 Adjustment of Offsets..............................................................5- 3
1.4.1 Manual Offsets ................................................................5- 3
1.4.2 Automatic Offsets ...........................................................5- 3
2. Replacement of Linear Measure Sensor .......................................5- 4
2.1 Detachment of Linear Measure Sensors ................................5- 4
2.2 Attachment of Linear Measure Sensor ....................................5- 5
2.2.1 Attachment of Linear Measure Sensor
on Light Emitting Side .....................................5- 5
2.2.2 Attachment of Linear Measure Sensors
on Light Emitting and Receiving Sides............5- 5
2.3 Adjustment of Offsets..............................................................5- 5
2.4 Adjustment of Linear Measure Sensor ....................................5- 6
3. Replacement of Doughnut Board ..................................................5- 9
3.1 Detachment of Doughnut Board..............................................5- 9
3.2 Attachment of Doughnut Board ...............................................5- 10
4. Replacement of Nozzle Shaft ........................................................5- 11
4.1 Detachment and Attachment of
Nozzle Shaft (Single Unit) ..............................................5- 11
4.1.1 Detachment of Nozzle Shaft (Single Unit) ......................5- 11
4.1.2 Attachment of Nozzle Shaft (Single Unit) ........................5- 11
4.1.3 Tightening Torque for Attachment of Cam Follower ........5- 11
4.2 Detachment of Nozzle Shaft Assembly ..................................5- 12
4.2.1 Detachment of Large Diffusion Plate ..............................5- 12
4.2.2 Detachment of Linear Measure Sensor ..........................5- 12
4.2.3 Attachment of Nozzle Shaft Holding Jig ..........................5- 13
4.2.4 Disassembly of Cam Follower Section ..........................5- 14
4.2.5 Detachment of Nozzle Shaft Assembly ..........................5- 14
4.3 Attachment of Nozzle Shaft Assembly ....................................5- 15
4.3.1 Attachment of Assembly to DD Motor Side .....................5- 15
4.3.2 Assembly of Cam Follower Section ................................ 5- 16
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Contents
Page
Cont-6
5. Location of Each Sensor ...............................................................5- 17
5.1 Location of NL-Axis Sensors and Stoppers ............................5- 17
5.2 Location of HL-Axis Sensors and Stoppers ............................5- 18
5.3 Nozzle Position Selection Detection Sensor ...........................5- 19
6. Adjustment of Offsets ....................................................................5- 20
6.1 Order of Offset Adjustments ...................................................5- 20
7. MSB Whole Cleaning and Lubrication Procedures........................5- 21
7.1 Purpose ...................................................................................5- 21
7.2 Required tools .........................................................................5- 21
7.3 Operation Procedures .............................................................5- 23
Chapter 6 Backup Base Section
1. Replacement of Backup Base Motor .............................................6- 1
1.1 Tightening Torque and Mounting Dimension for Backup
U/D Motor and Mechanical Lock .................. 6- 1
1.2 Confirmation of Height and Parallelism for Upper Surface
of Spline Shaft at Phase C Detection ..........6- 1
1.3 Backup U/D and Timing Belt ...................................................6- 2
1.4 Leveling of Ball Spline..............................................................6- 2
1.5 Setting Confirmation of Lower Limit Mechanical Stopper ........6- 2
1.6 Flatness Confirmation of Backup Base ...................................6- 3
2. Replacement of Backup Base Servoamplifier ...............................6- 4
2.1 Location of Servomotor Amplifier (Driver) ...............................6- 4
2.2 Detachment of Servoamplifier .................................................6- 4
2.3 Setting of Servoamplifier .........................................................6- 5
2.4 Attachment of Servoamplifier ..................................................6- 5
3. Backup Base Sensor Position .......................................................6- 6
3.1 Backup U/D and Lower Limit Detection ..................................6- 6
3.2 Setting of Protective Stopper
for Backup Base Detection Sensor .............6- 6
4. Backup Base Offsets.....................................................................6- 7
4.1 Backup Base Offsets ..............................................................6- 7
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