FlexTRAK 2MB Material Handler Addendum Rev 05.pdf - 第150页
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© 2023 Nordson Corporation A-1
A - Servicing Information
A.1 Overview
This appendix contains the Nordson service information for the plasma systems.
A.2 Servicing Information
If a plasma system requires service or if technical assistance is desired, contact
Technical Support. Be prepared to provide the following information:
The serial number of plasma system and all associated components.
q The currently installed software versions of the plasma system.
q A detailed description of process parameters, including the material being
etched, gas or gases used, chamber pressure during the process, RF power
levels applied, and duration of process.
q A detailed description of the problems encountered.
For recommended maintenance and part replacement procedures, refer to Section
8 -Maintenance and Appendix B - Parts Replacement.
A.3 Returning the Plasma System
If a plasma system is returned to Nordson for service or for any other reason, the
following procedure must be followed:
q Obtain a Return Authorization (RA) number through Technical Support. Display
this number on your shipping label. A unit received without a visible RA number
will be rejected.
q Repack the system in its original shipping container. If this is no longer
available, take special precautions to avoid damage to any parts of the system.
An approved shipping container may be purchased from Nordson.
q If the system is out of warranty, a purchase order will be required and you will
be billed for all parts, service, shipping costs, and travel expenses.
© 2023 Nordson Corporation B-1
B - Parts Replacement
B.1 Overview
This section includes general information for ordering recommended spares and
replacement parts for your 2MB Material Handler. Replacement part numbers are listed
in Table B-1 and Table B-2. Refer to the FlexTRAK Installation, Operations and
Maintenance manual for spares and replacement parts for the plasma module.
This section contains the following procedures:
q Parts Ordering Information
q Cleaning and Inspection
q Unpacking and Inspecting Replacement Parts
CAUTION! Operation of your plasma system involves heat, air pressure,
electrical power, mechanical devices, and the use of hazardous
materials. It is essential that every person servicing or operating the
plasma system fully understands all hazards, risks, and safety
precautions. Refer to Section 2 - Safety for additional information.
B.2 Record Keeping
The type of service performed should be recorded in the plasma system maintenance
records. Dates, part numbers/serial numbers of replaced parts, names of technicians,
and other pertinent data should be recorded.
CAUTION! Some part replacement procedures involve the use and
disposal of hazardous materials. Always follow the material manufacturer
SDS, facility requirements, and local regulations for protection of
personnel and disposal of materials.