FlexTRAK 2MB Material Handler Addendum Rev 05.pdf - 第8页

FlexTRAK Series 2MB M aterial Handler Addendum Table of Contents vi © 2023 Nordson Cor poration B.7.5 Gripper Assembly, Single-Solenoid Configuration ......................... .................... ....B-10 B.7.6 Gripper …

FlexTRAK Series 2MB Material Handler Addendum Table of Contents

6.8

Resetting the Number of Cycles ......................................................................................... 6-21

6.9

Reinitializing System Parameters ....................................................................................... 6-22

6.10

Resetting the User Boat Count ........................................................................................... 6-23

Teaching Axis Positions .................................................................................................................. 7-1

7.1

Teaching MH Axis Positions ................................................................................................. 7-1

7.2

Bypass Mode ......................................................................................................................... 7-4

7.2.1

Operating in Bypass Mode ....................................................................................... 7-5

Maintenance ...................................................................................................................................... 8-7

8.1

Overview ............................................................................................................................... 8-7

8.2

Safety First ............................................................................................................................ 8-7

8.3

Record Keeping ..................................................................................................................... 8-7

8.4

Recommended Shuttler Maintenance ................................................................................... 8-7

8.4.1

Removing the Gripper Assemblies ........................................................................... 8-9

8.4.2

Changing the Gripper Fingers and Detection Switches ......................................... 8-10

8.4.3

Tensioning the Conveyor Belts .............................................................................. 8-11

8.4.4

Replacing the Conveyor Belts ................................................................................ 8-12

Troubleshooting ............................................................................................................................... 9-1

9.1

Overview ............................................................................................................................... 9-1

9.2

Safety First ............................................................................................................................ 9-1

9.3

Record Keeping ..................................................................................................................... 9-1

9.4

Basic System Troubleshooting .............................................................................................. 9-2

9.5

Material Handling Alarms ...................................................................................................... 9-3

A -

Servicing Information ..................................................................................................................... A-1

A.1

Overview ............................................................................................................................... A-1

A.2

Servicing Information............................................................................................................. A-1

A.3

Returning the Plasma System ............................................................................................... A-1

B -

Parts Replacement .......................................................................................................................... B-1

B.1

Overview ............................................................................................................................... B-1

B.2

Record Keeping ..................................................................................................................... B-1

B.3

Parts Ordering Information .................................................................................................... B-2

B.3.1

Placing Your Order ................................................................................................... B-2

B.3.2

Shipping Instructions ................................................................................................ B-2

B.3.3

Parts Warranty ......................................................................................................... B-2

B.3.4

Credit and Exchanges .............................................................................................. B-2

B.4

Cleaning and Inspection ........................................................................................................ B-2

B.5

Unpacking and Inspecting Replacement Parts ..................................................................... B-3

B.6

Spare Parts List ..................................................................................................................... B-3

B.7

Illustrated Parts ..................................................................................................................... B-4

B.7.1

FlexTRAK-2MB Electrical System ............................................................................ B-5

B.7.2

2MB Shuttler System ............................................................................................... B-7

B.7.3

Upper Gripper Drive Assembly ................................................................................ B-8

B.7.4

Lower Gripper Drive Assembly ................................................................................ B-9

FlexTRAK Series 2MB Material Handler Addendum Table of Contents

B.7.5

Gripper Assembly, Single-Solenoid Configuration .................................................B-10

B.7.6

Gripper Assembly, Dual-Solenoid Configuration ...................................................B-11

B.7.7

Gripper Finger and Switch Options ........................................................................B-12

B.7.8

Dual-Lane Conveyor System - Lane 1 ...................................................................B-14

B.7.9

Dual-Lane Conveyor System - Lane 2 ...................................................................B-15

B.7.10

Lane Shift Assembly ..............................................................................................B-16

1 Introduction

1.1 Overview

The FlexTRAK-2MB System is a fully integrated plasma and Material Handling System (MHS). This

addendum is specific to the FlexTRAK-2MB material handling system and describes all system controls,

user-level hardware, interfaces, screens, and menus, along with their associated operating procedures.

Refer to the FlexTRAK Series Installation, Operations, and Maintenance Manual for specific information

regarding the standard FlexTRAK system. Refer to the HMI Software User Guide for directions on how

to use the software.

This section covers the following topics:

• General Description

• Typical System Applications

• Major System Components

1.2 General Description

The FlexTRAK-2MB consists of a standard base FlexTRAK system and an integrated material handling

system. The FlexTRAK includes features such as a patented plasma chamber design providing

exceptional etch, uniformity, and process repeatability. The material handling system completes the

overall system by incorporating a two-arm pick-and-place unit as well as a dual lane conveyance system.

The FlexTRAK-2MB is a fully automatic tool and is configurable as an in-line or stand-alone (batch)

system. The FlexTRAK-2MB is SMEMA 1.2 compatible for standard integration with

upstream/downstream systems and/or freestanding loaders. Our internal two-lane conveyance system can

integrate with dual lane conveyance systems or some single lane conveyance systems (depending on boat

width). See Section 4 - System Components for a detailed description of material handler components.

The system utilizes the standard FlexTRAK software integrated with specially designed material handling

software for the 2MB Material Handler. The software features a user-friendly Human Machine Interface

(HMI) that includes touch screen features. Software specific to the 2MB Material Handler is included

within this manual. Refer to the HMI Software User Guide for directions on how to use the software to

control the standard base FlexTRAK system.

1.3 Typical System Applications

The FlexTRAK-2MB system is designed around the industry standard Semiconductor Carrier Transport.

These carriers include 75 mm-wide, 136 mm-wide, and 160 mm-wide process carriers (also called

“boats”). The standard system is designed to accommodate process carriers with a minimum width of

75 mm. The tooling of the pick-and-place units can be adapted for custom carriers. Please contact

Technical Support for further details.