FlexTRAK 2MB Material Handler Addendum Rev 05.pdf - 第39页

FlexTRAK Series 2MB Mater ial Handler Adden dum Installation © 2023 Nordson Corporation 3-7 3.6 Connecting to the Facilit y DANGER! Combining the process gas oxygen with hydrogen or forming gas can cause fir e or explosi…

FlexTRAK Series 2MB Material Handler Addendum Installation

Item Description

1 Height Adjustment Locking Nut (7/8 inch open-end wrench)

2 Leveler (Footpad)

3 Wheel Assembly

Figure 3-2 Leveling the System

7. Align Lane 1 by sliding a workpiece from the upstream machine's conveyor to the

FlexTRAK-2MB conveyor and then from the FlexTRAK-2MB conveyor to the downstream

machine’s conveyor.

NOTE Use an open-end wrench to turn the height adjustment nut in the desired

direction to maintain levelness throughout the system.

8. Align Lane 2.

„ This is a teachable setting within the FlexTRAK-2MB system software.

„ Enter into the teach mode to align and teach this lane with the upstream and

downstream machines, see 3.7 Initial Start-up Procedure.

9. If desired, install seismic brackets on each leveler or use other methods to anchor the

system in place.

FlexTRAK Series 2MB Material Handler Addendum Installation

3.6 Connecting to the Facility

DANGER! Combining the process gas oxygen with hydrogen or forming gas

can cause fire or explosion. Ensure that these gases are not supplied to the

plasma system at the same time. Hydrogen should only be supplied by a low-

volume hydrogen generator.

WARNING! Appropriate lockable valves should be installed on inlets for gas

lines supplying hazardous gases or high-pressure nitrogen.

CAUTION! Certain process gases selected for use with this equipment may

be hazardous. Consult with your facilities safety officer to ensure proper

precautionary steps are taken before these gases are connected or used.

CAUTION! All process gas connections must be made with corrosion

resistant materials such as PTFE or stainless-steel tubing. Other materials may

corrode, clogging gas shut-off solenoids and mass flow controllers.

WARNING! When an optional chiller is hooked up to the FlexTRAK, a

lockable water valve should be installed on the water-in port.

To connect the material handler to the facility (Figure 3-3):

1. Using a 9/16-inch wrench or adjustable wrench, connect the gas/water cooling system

supply lines to the rear of the FlexTRAK-2MB System.

NOTE Connect the lines directly to the appropriate inlet connector or lockable valve,

as applicable.

„ Pressurized air supply line to the CDA inlet.

„ Chamber purge gas supply line (N

or CDA) to the PURGE inlet (Pump Purge option

only).

„ Vacuum Pump N

purge to the PUMP PURGE inlet.

„ Process gas supply lines to the GAS 1, GAS 2, GAS 3, and GAS 4 inlets. Water lines

to WATER IN and WATER OUT ports.

„ Chamber drain line(s) to a water containment system.

WARNING! Run the cooling system and check for any water leaks before

connecting the main power.

2. Attach a facility-compatible power plug to the main power cord.

FlexTRAK Series 2MB Material Handler Addendum Installation

WARNING! To prevent shock hazards to personnel, only a grounded power

plug should be installed on the power cord.

3. Connect the main power cord to the facility AC power source.

4. Attach the facility exhaust line to the exhaust port.

Item Description Item Description

Pump Purge Inlet (N

) (Pump Purge option

only)

12 Main Power Cord

2 System Pressure (CDA) 13 Cooling Fan

3 Chamber Purge Gas (CDA/N

) 14 Chamber Drain Port (Optional)

4 Gas 1 Inlet 15 Exhaust Port

5 Gas 2 Inlet 16 Local Area Network Ethernet Port

6 Gas 3 Inlet (Optional) 17

Downstream Material Handler Ethernet

Port

7 Gas 4 Inlet (Optional) 18 Water Out Port (Optional)

8 Upstream Material Handler Interface 19 Water In Port (Optional)

9 Upstream SMEMA Connector 20 Downstream SMEMA Connector

10 SECS/GEM Host Ethernet Port 21 Downstream Material Handler Interface

Upstream Material Handler

Ethernet Port

Figure 3-3 Facility Connections