FlexTRAK 2MB Material Handler Addendum Rev 05.pdf - 第42页

FlexTRAK Series 2MB Mater ial Handler Adden dum Installation 3-10 © 2023 Nordson Corporation Item Description 1 Chamber Purge Gas (N 2 ) Regulator and Gauge (30 psi max) 2 Main Air (CDA) Regulator and Gauge (80 psi ma x)…

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FlexTRAK Series 2MB Material Handler Addendum Installation
© 2023 Nordson Corporation 3-9
5. Connect the following communication cables, as applicable (Figure 3-3).
a. SMEMA connectors for the upstream and downstream machines.
b. Interface connectors for the upstream (UMH Interface) and downstream (DMH
Interface) material handler.
c. Ethernet connector for the SECS/GEM host (optional).
3.7 Initial Start-up Procedure
CAUTION! Certain process gases selected for use with this equipment may
be hazardous. Consult your facilities safety officer to ensure proper
precautionary steps are taken before these gases are connected or used.
To perform initial system start-up:
1. Adjust facility gas supplies to the following pressures:
„ Main Air (CDA): 80 to 100 psi (5.5 to 6.9 bar)
„ Chamber Purge Gas (N
2
): 10 to 100 psi (0.7 to 6.9 bar)
„ Process Gasses: 10 to 15 psi (0.7 to 1.0 bar).
2. Remove the rear access panel and adjust the regulators (Figure 3-3):
„ Chamber Purge Gas (N
2
): 10 to 30 psi (0.7 bar to 2.1 bar)
„ Main Air (CDA): 60 to 80 psi (4.1 to 5.5 bar)
„ Optional Pump Purge Gas (N
2
): 5 psi (0.3 bar) maximum
FlexTRAK Series 2MB Material Handler Addendum Installation
3-10 © 2023 Nordson Corporation
Item Description
1 Chamber Purge Gas (N
2
) Regulator and Gauge (30 psi max)
2 Main Air (CDA) Regulator and Gauge (80 psi max)
3 Vacuum Pump Purge (N
2
) Regulator and Gauge (5 psi max)
4
Optional Exhaust Purge (H
2
) Gauge & Regulator
(10 psi max) (refer to the Hydrogen Gas documentation provided
with the H2 option)
Figure 3-4 Air and Purge Gas Regulator/Gauge Location
4
3
2
1
FlexTRAK Series 2MB Material Handler Addendum Installation
© 2023 Nordson Corporation 3-11
3. Turn the main circuit breaker (Figure 3-5) to the ON (up) position.
Item Description
1 FlexTRAK-2MB Rear Access Panel
2 Main Circuit Breaker
Figure 3-5 Main Circuit Breaker
1
2