00198599-02_AI_Vacuumpump_X-Series-S-from-Hxxxx_DE_EN.pdf - 第141页

3 Installation 3.4 Converting the SIPLACE C&P20x Assembly Instructions / Montageanleitung SIPLACE X-Series S (from/ab Hxxxx) Option Vacuum Pump 02/2021 141 Installation NOTICE Aperture ring Before inserting the apert…

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3 Installation
3.4 Converting the SIPLACE C&P20x
140 Assembly Instructions / Montageanleitung SIPLACE X-Series S (from/ab Hxxxx) Option Vacuum Pump 02/2021
3.4.3.2 Fitting the aperture ring and vacuum cover (SIPLACE C&P20 P2)
Overview
Fig.20: Aperture ring
1 03165750-xx Aperture ring assembly SIPLACE C&P20 P2 (including sealing disc and
cover)
2 03006234-xx O-Ring 40x1.5
3 03105638-xx Sealing disc C&P20P
4 --- Pins
5 --- Groove: this groove shows the position of the pin (4) for easier installation.
6 03165754-xx Cover assembly C&P20 P2
03110132‑xx Sealing gasket M4 (for cover)
3 Installation
3.4 Converting the SIPLACE C&P20x
Assembly Instructions / Montageanleitung SIPLACE X-Series S (from/ab Hxxxx) Option Vacuum Pump 02/2021 141
Installation
NOTICE
Aperture ring
Before inserting the aperture ring, make sure that the sealing disk has been positioned cor-
rectly (orientation) on the aperture ring.
When inserting the new aperture ring, make sure that the pin engages in the relevant hole
on the star carrier. The aperture ring should remain fixed by itself.
► When tightening the screws, carefully take hold of the star near the segment guidances and
hold it on the star carrier.
► Make sure you do not damage the anti-glare shield or the nozzles.
Fig.21: Aperture ring
► Fix the aperture ring into place with the
screws(1)
DIN912-M3x10 (1.3Nm).
Make sure that it is not distorted.
► Check whether the O-ring has been
properly placed into the groove on the
aperture ring.
Fig.22: Fitting the cover
► Fit the cover(2) and fix with a screw(1)
(TX10, M4x14, 1.3Nm).
See also
2 7.4.7.1 "Replacing the aperture ring/holding circuit/sealing disc" [}201]
3 Installation
3.4 Converting the SIPLACE C&P20x
142 Assembly Instructions / Montageanleitung SIPLACE X-Series S (from/ab Hxxxx) Option Vacuum Pump 02/2021
3.4.4 Installing the pressure sensor
NOTICE
Pressure sensor
Each SIPLACE C&P20P/P2 requires a pressure sensor in vacuum operation.
► Check whether a pressure sensor is present on each SIPLACE C&P20P/P2.
► One upgrade kit pressure sensor for vacuum C&P20P [03108457‑xx] may be re-
quired for each placement head to be retrofitted.
Fig.23: Pressure sensor
Pressure sensor vacuum connection C&P20
P [03108303-xx]
Fig.24: Pressure sensor on the gantry
1. Pressure sensor
2. Base adapter
The pressure sensor is located on the
vacuum distributor of the gantry and is con-
nected to the base (X8) adapter.
See also 7.4.2 "Replacing the pressure sensor [03108303-xx]" [}190].