4OM-1625-004_w.pdf - 第109页

4OM-1603 1-56 4. Maintenance Method : Chap.1 1003-001 4.2 Nozzle Filter Change 4.2.1 Nozzle Filter Removal Procedure Push out the nozzle lter using the lter removal jig as shown in the following gure. Filter Removing …

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4OM-1603
1-55
4. Maintenance Method : Chap.1
1012-001
•
Cleaning Procedure of Soft Mounted Nozzle
(1) Set the soft mounted nozzle onto the nozzle stand.
Notice
(a) Set the nozzles with the identical nozzle ID onto the soft
mounted nozzle cleaning jig.
Do not set the HG22C, HG32C and HG52C nozzles together
for the nozzle cleaning.
(b) When the nozzle is to be installed onto the jig, take care of its
direction.
(2) Set the nozzle holding plate according to the guide pin.
Note
Lower the nozzle holding plate until the soft mounted nozzle tip is shrunk
by about 0.3mm, then x it with the set screw.
(3) Dip the cleaning jig in the ultrasonic cleaning unit lled with clean water,
and move the nozzle holding plate slowly up and down about 30 times.
Note
Only fresh water should be used as cleaning water. Also, use clean water
without including any debris in the ultrasonic cleaning operation.
Ultrasonic Cleaning Unit Cleaning Tank
Move it up and down about 30 times.
F4A39-2b
(4) Perform the ultrasonic cleaning for about 15 minutes.
(5) After the ultrasonic cleaning, keeping the nozzles in the ultrasonic cleaning
unit, move the nozzle holding plate slowly again about 30 times.
(6) After the ultrasonic cleaning, air-blow the nozzles to completely remove
moisture.
Notice
When the soft mounted nozzle is to be cleaned separately, do not
use the used water for washing.
If the water contains debris, etc., the nozzle operation section might
be clogged with such debris and nozzle operation hindered.
4OM-1603
1-56
4. Maintenance Method : Chap.1
1003-001
4.2 Nozzle Filter Change
4.2.1 Nozzle Filter Removal Procedure
Push out the nozzle lter using the lter removal jig as shown in the following
gure.
Filter Removing Jig
Vacuum Nozzle
Push
Pushing out the nozzle filter.
F4A39-3
4OM-1603
1-57
4. Maintenance Method : Chap.1
1003-001
4.2.2 Nozzle Filter Insertion Procedure
•
For High-Speed Nozzle
Procedure
(1) Set the nozzle lter in the hole section.
Hole Section
Nozzle Filter
F4A39-4
(2) Insert the lter holding block into the opening section of the lter set.
Filter Holding Block
F4A39-5