4OM-1625-004_w.pdf - 第110页
4OM-1603 1-57 4. Maintenance Method : Chap.1 1003-001 4.2.2 Nozzle Filter Insertion Procedure • For High-Speed Nozzle Procedure (1) Set the nozzle lter in the hole section. Hole Section Nozzle Filter F4A39-4 (2) Insert …

4OM-1603
1-56
4. Maintenance Method : Chap.1
1003-001
4.2 Nozzle Filter Change
4.2.1 Nozzle Filter Removal Procedure
Push out the nozzle lter using the lter removal jig as shown in the following
gure.
Filter Removing Jig
Vacuum Nozzle
Push
Pushing out the nozzle filter.
F4A39-3

4OM-1603
1-57
4. Maintenance Method : Chap.1
1003-001
4.2.2 Nozzle Filter Insertion Procedure
•
For High-Speed Nozzle
Procedure
(1) Set the nozzle lter in the hole section.
Hole Section
Nozzle Filter
F4A39-4
(2) Insert the lter holding block into the opening section of the lter set.
Filter Holding Block
F4A39-5

4OM-1603
1-58
4. Maintenance Method : Chap.1
1012-003
(3) Orient the nozzle lter opening section to the lter insertion jig and insert the
nozzle into the guide section.
Note
Pay attention to the direction of the nozzle lter opening section.
F4A39-6
(4) Fix the nozzle by holding it from the side with your nger so that the nozzle
is not inclined.
Nozzle
Press it
from the side.
F4A39-7
(5) Push the sliding section to the main machine acrylic block end face and
insert the nozzle lter.
Acrylic Block End Face
Sliding Section
Push
F4A39-8