4OM-1625-004_w.pdf - 第110页

4OM-1603 1-57 4. Maintenance Method : Chap.1 1003-001 4.2.2 Nozzle Filter Insertion Procedure • For High-Speed Nozzle Procedure (1) Set the nozzle lter in the hole section. Hole Section Nozzle Filter F4A39-4 (2) Insert …

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4OM-1603
1-56
4. Maintenance Method : Chap.1
1003-001
4.2 Nozzle Filter Change
4.2.1 Nozzle Filter Removal Procedure
Push out the nozzle lter using the lter removal jig as shown in the following
gure.
Filter Removing Jig
Vacuum Nozzle
Push
Pushing out the nozzle filter.
F4A39-3
4OM-1603
1-57
4. Maintenance Method : Chap.1
1003-001
4.2.2 Nozzle Filter Insertion Procedure
For High-Speed Nozzle
Procedure
(1) Set the nozzle lter in the hole section.
Hole Section
Nozzle Filter
F4A39-4
(2) Insert the lter holding block into the opening section of the lter set.
Filter Holding Block
F4A39-5
4OM-1603
1-58
4. Maintenance Method : Chap.1
1012-003
(3) Orient the nozzle lter opening section to the lter insertion jig and insert the
nozzle into the guide section.
Note
Pay attention to the direction of the nozzle lter opening section.
F4A39-6
(4) Fix the nozzle by holding it from the side with your nger so that the nozzle
is not inclined.
Nozzle
Press it
from the side.
F4A39-7
(5) Push the sliding section to the main machine acrylic block end face and
insert the nozzle lter.
Acrylic Block End Face
Sliding Section
Push
F4A39-8