4OM-1625-004_w.pdf - 第114页
4OM-1603 1-61 4. Maintenance Method : Chap.1 1012-001 4.3 Use Procedure of Diffusion Plate Setup Jig Procedure (1) Set the both inner and outer diffusion plates temporarily . Outer Diffusion Plate Inner Diffusion Plate F…
4OM-1603
1-60
4. Maintenance Method : Chap.1
1012-003
(4) Fix the nozzle ange holding its lower surface upward by nger so that the
nozzle is not inclined.
Nozzle
Press it
upward.
F4A39-7
(5) Push the sliding section to the main machine acrylic block end face and
insert the nozzle lter.
Acrylic Block End Face
Sliding Section
Push
F4A39-8
4OM-1603
1-61
4. Maintenance Method : Chap.1
1012-001
4.3 Use Procedure of Diffusion Plate Setup Jig
Procedure
(1) Set the both inner and outer diffusion plates temporarily.
Outer Diffusion Plate
Inner Diffusion Plate
F4A40
(2) Attach the Jigs No. 1 and No. 2 onto the three locations as shown in the
gure.
Take care not to damage the linear measure sensor.
Jig 1 Jig 2
F4A41
(2) After xing the diffusion plates using bolts, remove the jigs No. 1 and No. 2.
F4A42
4OM-1603
1-62
5. Consumables and Servicing Parts : Chap.1
1012-005
5. Consumables and Servicing Parts
5.1 List of Consumables
This component list is for the components that would be worn within one year.
When any of these components are to be purchased, contact Marketing Dept. of
HITACHI High-Technologies or our sales agent.
Product Name Part No. Part Name Q'ty
Recommended
number per year
note (a)
Exploded
Illustration
Remarks
Nozzle (HV81C) HV81C--- ASSY, NOZZLE (HV81C) 30 30
Nozzle (HV03C) HV03C--- ASSY, NOZZLE (HV03C) 30 30
Nozzle (HB03C) HB03C--- ASSY, NOZZLE (HB03C) 30 30
Nozzle (HB04C) HB04C--- ASSY, NOZZLE (HB04C) 30 30
Nozzle (HA04C) HA04C--- ASSY, NOZZLE (HA04C) 30 30
Nozzle (HA05C) HA05C--- ASSY, NOZZLE (HA05C) 30 30
Nozzle (HA09C) HA09C--- ASSY, NOZZLE (HA09C) 30 30
Nozzle (PA05C) PA05C--- ASSY, NOZZLE (PA05C) 30 30
Nozzle (HG31C) HG31C--- ASSY, NOZZLE (HG31C) 30 30
Nozzle (HG51C) HG51C--- ASSY, NOZZLE (HG51C) 30 30
Nozzle (HG21C) HG21C--- ASSY, NOZZLE (HG21C) 30 30
Vacuum Filter 225B0572 AIR LINE EQPT 60 240 Fig. G1-5,
Fig. O1-1
Fluorine Sheet 212A2743 GUIDE 2 2 Fig. C2-1
Urethane Clamp
ASSY
0920715E
09207152
Sliding Type Clamper ASSY
Fixed Type Clamper ASSY
2
2
2
2
Fig. C2-5
Seal ASSY
Flat Ring
Set Bolt
0920715E
0920H159
0920H158
SEAL
Screw 01605B0
2
2
12
2
2
12
Fig. C2-6 Cutter Unit
Sliding Side
For the Roller
DISK ASSY
Cutter Blade
Cutter Blade Set Bolt
0920716C
0920H127
221A0231
DISK
BOLT, HEX-SCT
4
4
12
4
4
12
Fig. C2-6 Note (c)
Nozzle Filter 225A0045 Nozzle Filter 30
(15)
960
(480)
Fig. D1-1 Note (d)
Vacuum Filter 630 069
5816
AIR LIN EQPT 3 18 Fig. D1-1 Note (d)
T4A16
Note
(a) The recommended number of pieces is the value for reference only.
(b) Refer to "3. Maintenance Spots" for component replacement procedures.
(c) For the cutter blade replacement, consult with our service personnel
because it is a dangerous procedure.
When the cutter blade is replaced, also replace the bolt.
(d) The gures in brackets are applied for the multi-functional head.