4OM-1625-004_w.pdf - 第168页
4OM-1603 3-13 3. Error IDs and Remedial Procedures : Chap.3 1012-005 Error ID Error Name, Description, Cause, and Remedy 400f02 Safety Cover FailedinlockingSimpliedCover . ----- 400f03 Safety Cover Failed in locking…

4OM-1603
3-12
3. Error IDs and Remedial Procedures : Chap.3
1012-005
Error ID Error Name, Description, Cause, and Remedy
400c04 Nozzle stocker down time out
Nozzle stock unit lower bound detection 4 was not turned on in prescribed time.
Pleaseconrmthelowerbounddetection
4sensorofnozzlestockunit.
400d01 Software Interlock Error
Head (Rear) NL axis's poor operation was detected, and the scram of the XY axis
was carried out.
Please perform a zeroing.
400d02 Software Interlock Error
Head (Rear) NL axis's poor operation was detected, and the scram of the XY axis
was carried out.
Please perform a zeroing.
400d03 Software Interlock Error
NL axis(Front) Interlock Detected.
Pleaseconrmthenozzlehasnot
fallenwhenyoupushthebeambythehand.
Please perform a zeroing.
400d04 Software Interlock Error
NL axis(Rear) Interlock Detected.
Pleaseconrmthenozzlehasnot
fallenwhenyoupushthebeambythehand.
Please perform a zeroing.
400d05 Software Interlock Error
L1 axis(Front) Interlock Detected.
Pleaseconrmthenozzlehasnot
fallenwhenyoupushthebeambythehand.
PleaseconrmdetectionofPassLine,excesspushing.
400d06 Software Interlock Error
L2 axis(Front) Interlock Detected.
Pleaseconrmthenozzlehasnot
fallenwhenyoupushthebeambythehand.
PleaseconrmdetectionofPassLine,excesspushing.
400d07 Software Interlock Error
L3 axis(Front) Interlock Detected
PleaseconrmdetectionofPassLine,
excesspushing.
400d08 Software Interlock Error
L1 axis(Rear) Interlock Detected.
Pleaseconrmthenozzlehasnot
fallenwhenyoupushthebeambythehand.
PleaseconrmdetectionofPassLine,excesspushing.
400d09 Software Interlock Error
L2 axis(Rear) Interlock Detected.
Pleaseconrmthenozzlehasnot
fallenwhenyoupushthebeambythehand.
PleaseconrmdetectionofPassLine,excesspushing.
400d0a Software Interlock Error
L3 axis(Rear) Interlock Detected.
Pleaseconrmthenozzlehasnot
fallenwhenyoupushthebeambythehand.
PleaseconrmdetectionofPassLine,excesspushing.
400f01 Safety Cover
Safety cover opened
Close the safety cover and lock it.

4OM-1603
3-13
3. Error IDs and Remedial Procedures : Chap.3
1012-005
Error ID Error Name, Description, Cause, and Remedy
400f02 Safety Cover
FailedinlockingSimpliedCover.
-----
400f03 Safety Cover
Failed in locking
Auto Cover.
-----
401001 Cart
No Cart
There is a possibility that the Front/Rear of Cart is missing. Please put the cart in.
401101 Emergency Stop Switch
The [emergency stop] switch was pressed.
(Pleaseconrmthenozzlehasnot
fallenwhenyoupushthebeambythehand.)
Please switch on a power supply after canceling an emergency stop switch and
screen return to normal display.
401201 Safety Cover
The safety cover opened. [K4]
Please shut a safety cover and push the [POWER ON] button.
401301 Shut-off Beam
The main circuit of the XY Beam was broken. [K**]
-----
401401 Head(Rear) Nozzle descending
Head (Rear) nozzle descent was detected. [A-B****]
Please perform a zeroing.
401501 Head(Front) Nozzle descending
Head (Front) nozzle descent was detected. [B-B****]
Please perform a zeroing.
401601 Head(Rear) Nozzle descending
Head (Rear) descent was detected. [A-B****]
Please perform a zeroing.
401701 Head(Front) Nozzle descending
Head (Front) descent was detected. [B-B****]
Please perform a zeroing.
401801 Detecting pickup miss Cmpnt(Rear)
A pickup-failed component (Rear) was detected. [DA-B****]
1.
Open the cover.
2. Conrmsuppressor,DisengagedLatch
andremovethePickupmisscmpnt.
3. Close the cover and then Lock it.
401901 Detecting pickup miss Cmpnt(Front)
A pickup-failed component (Front) was detected. [DB-B****]
1. Open the cover.
2. Conrmsuppressor,DisengagedLatch
andremovethePickupmisscmpnt.
3. Close the cover and then Lock it.
401A01 Feeder Opening Sensor(Rear)
The feeder opening sensor (Rear) was shaded. [B****]
Please remove the factor which is shading the feeder opening sensor (rear), and
carry out zero return.

4OM-1603
3-14
3. Error IDs and Remedial Procedures : Chap.3
1012-005
Error ID Error Name, Description, Cause, and Remedy
401B01 Feeder Opening Sensor(Front)
The feeder opening sensor (Front) was shaded. [B****]
Please remove the factor which is shading the feeder opening sensor (front), and
carry out zero return.
401C01 Detecting Feeder Disengaged Latch Rear)
Disengaged Latch(Rear) was detected.
1. Open the cover.
2. Conrmsuppressor,DisengagedLatch
andremovethePickupmisscmpnt.
3. Close the cover and then Lock it.
401D01 Detecting Feeder Disengaged Latch Front)
Disengaged Latch(Front) was detected.
1. Open the cover.
2. Conrmsuppressor,DisengagedLatch
andremovethePickupmisscmpnt.
3. Close the cover and then Lock it.
401E01 Cancelling the safety cover lock
The safety cover lock was released.
Close the safety cover and lock it.
401F01 Detecting interlock of Head(Rear)
Head (Rear) interlock was detected.
Please perform a zeroing.
402001 Detecting interlock of Head(Front)
Head (Front) interlock was detected.
Please perform a zeroing.
402101 Detecting air pressure down
Air pressure down was detected.
Check air pipe came off or bend, air compressor.
402201 Vacuum pump stop
Circuit breaker of Vacuum pomp was tripped.
Check vacuum pump and wiring.
402301 Beam(Rear) Breaker Off
Circuit breaker of XY Beam (Rear) was tripped.
Check
servoamplierandcables.
402401 Beam(Front) Breaker Off
Circuit breaker of XY
Beam (Front) was tripped.
Checkservoamplierandcables.
402501 Over squeeze1 detected (Rear)
Over squeeze1 detected (Rear)[B05]
-----
402601 Over squeeze2 detected (Rear)
Over squeeze2 detected (Rear)[B05]
-----
402701
Over squeeze3 detected (Rear)
Over squeeze3 detected (Rear)[B05]
-----
402801 Pass Line1 Detected(Rear)
Pass Line1 detected(Rear)[B04]
-----