MAN00000772_SI-G200BB_SVCPDFA.pdf - 第267页

HLGB-10313-01 Mount A ccuracy Calibration Click the OK button on the confirmation window . Press the [ST ART ] butt on on the operation pane l .

HLGB-10313-01

Mount Accuracy Calibration

Display OPERATION SETUP to check

that settings are as follows.

Display Motion Setup (Unit) screen to

check that settings are as follows.

Make sure the wrong pickup or pickup error

does not occur.

Click in an order of M/C SETUP menu

 M/C MAINTENANCE tab 

Calibration button.

HLGB-10313-01

Mount Accuracy Calibration

Click the OK button on the

confirmation window.

Press the [START] button on the

operation panel.

HLGB-10313-01

Mount Accuracy Calibration

When the calculation result is 3Sigma <

±40[µm] and Avg < 10[µm], the catalog SPEC

(±60[µm] CPK > 1.0) is satisfied.