MAN00000772_SI-G200BB_SVCPDFA.pdf - 第584页
PCGB-10108-01 Pneumatic Piping Diagram for S Axis G 6 6 7 1 1 7 1 8 1 1 1 1 B C F F F F A A A A B C 4 3 2 4 3 2 6 6 D E D E 5 5 2 5 5 2 9 10 9 10

PCGB-10107-01
Pneumatic Piping Diagram for Nozzle
Change
C
B
A
1
6
7
7
5
5
8
3 3
N O
4
2
3 3
L M
4
2
3 3
J K
4
2
3 3
H I
4
2
3 3
F G
4
2
3 3
D E
4
2
1
6
7
7
5
5
3 3
N O
4
2
3 3
L M
4
2
3 3
J K
4
2
3 3
H I
4
2
3 3
F G
4
2
3 3
D E
4
2

PCGB-10108-01
Pneumatic Piping Diagram for S Axis
G
6
6
7
11
7
1
8
11
11
B C
F F F F
A A A A
B C
4 3
2
4 3
2
6
6
D ED E
5
5
2
5
5
2
9 10 9 10
