MAN00000772_SI-G200BB_SVCPDFA.pdf - 第268页
HLGB-10313-01 Mount A ccuracy Calibration When the calculation re sult is 3Sigma < ±40[µm] and A vg < 10[µm], the c a talog SPEC (±60[µm] CPK > 1.0) is satisfied.
HLGB-10313-01
Mount Accuracy Calibration
Click the OK button on the
confirmation window.
Press the [START] button on the
operation panel.
HLGB-10313-01
Mount Accuracy Calibration
When the calculation result is 3Sigma <
±40[µm] and Avg < 10[µm], the catalog SPEC
(±60[µm] CPK > 1.0) is satisfied.
HLGB-10314-01
XY Axis Software Limit Setup
[Setup procedure]
FrontsideX-Axis
FrontsideY-Axis
RearsideX-Axis
RearsideY-Axis
For the front side, open Properties
window for ac_param.ini file in
C:¥asm¥mcdata1.
For the rear side, open Properties
window for ac_param.ini file in
C:¥asm¥mcdata2.