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LAGB-10124-01 Interface Panel SUPPLIED AIR V ACUUMPUMP RELEASE H/C CASSETTE AIR CASSETTEI/F AIR 0.49MPa TY -MLOUT TY -ACOUT TY -CTLOUT

LAGB-10124-01

Interface Panel

AIR

LAN-2 I/L EMG-L

EX.EMG

H/C

RELEASE

I/F-L

H.M

HOST

S-IL EMG-R

IF-R

AIR

LAN-T

LAN-2

CASSETTEAIR

CASSETTEI/F

PATO

LAGB-10124-01

Interface Panel

SUPPLIEDAIR

VACUUMPUMP

RELEASE

H/C

CASSETTEAIR

CASSETTEI/F

AIR

0.49MPa

TY-MLOUT

TY-ACOUT

TY-CTLOUT

LAGB-10125-01

Tray Unit (OPTION)