00198829-01_SM_X-Series-S_Hxxxx_EN.pdf - 第116页
6 Gantries 6.3 X and Y axis 116 Service Manual SIPLACE X-Series S (from Hxxxx) 01/2021 Fig.147: Operation of test device PG-U - 4

6 Gantries
6.3 X and Y axis
Service Manual SIPLACE X-Series S (from Hxxxx) 01/2021 115
Fig.145: Operation of test device PG-U - 2
Fig.146: Operation of test device PG-U - 3

6 Gantries
6.3 X and Y axis
116 Service Manual SIPLACE X-Series S (from Hxxxx) 01/2021
Fig.147: Operation of test device PG-U - 4

6 Gantries
6.3 X and Y axis
Service Manual SIPLACE X-Series S (from Hxxxx) 01/2021 117
6.3.5 Replacing the Y Axis Buffer (SIPLACE Service only)
NOTICE
SIPLACE Service
This task may only be performed by SIPLACE service technicians.
6.3.6 Replacing the X Scale (SIPLACE Service only)
NOTICE
SIPLACE Service
This task may only be performed by SIPLACE service technicians.
6.3.7 Replacing the Y Scale (SIPLACE Service only)
NOTICE
SIPLACE Service
This task may only be performed by SIPLACE service technicians.