CM602all_EJM8AESM_Service Manual.pdf - 第335页
Machinery Part Replacement Main Body Remarks Item Disconnect the terminals. Phillips screwdriver #2 Screw M4 4 pcs. Remove the tube. φ 10 2 pcs. φ 6 1 pc. Disconnect the fan connector. Connector No. FANP-1.FANAP Remove t…
Machinery Part Replacement Main Body
Remarks
Switch off the main power.
Turn the switch to the left.
Remove the lower chute.
Allen key 4 mm
Screw M5x 12mm 4 pcs.
Thick washer 4 pcs.
Phillips screwdriver #2
Round cross-cut screw
M5 4 pcs.
Open the vacuum pump terminal cover.
Phillips screwdriver #2
Screw M4 4 pcs.
3
4
1
Item
2
Remove the bottom cover from Stage AR or BR.
Chute holding
section (left)
Chute holding
section (right)
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Machinery Part Replacement Main Body
Remarks
Item
Disconnect the terminals.
Phillips screwdriver #2
Screw M4 4 pcs.
Remove the tube.
φ 10 2 pcs.
φ 6 1 pc.
Disconnect the fan connector.
Connector No. FANP-1.FANAP
Remove the earth cable from the fan.
Phillips screwdriver #2
Screw M4 1 pc.
7
8
5
6
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Machinery Part Replacement Main Body
Remarks
Item
Remove the bolts from the vacuum pump holding bracket.
Allen key 6 mm
Screw M8 4 pcs.
Pull out the vacuum pump.
Remove the tube joint from the vacuum pump.
Wrench 22 mm
Wrench 19 mm
Wrench 14 mm
Fit the tube joint into the new pump.
Wrench 22 mm
Wrench 19 mm
Wrench 14 mm
Sealing tape
9
10
11
12
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