CM602all_EJM8AESM_Service Manual.pdf - 第336页
Machinery Part Replacement Main Body Remarks Item Remove the bolts from the vacuum pump holding bracket. Allen key 6 mm Screw M8 4 pcs. Pull out the vacuum pump. Remove the tube joint from the vacuum pump. Wrench 22 mm W…
Machinery Part Replacement Main Body
Remarks
Item
Disconnect the terminals.
Phillips screwdriver #2
Screw M4 4 pcs.
Remove the tube.
φ 10 2 pcs.
φ 6 1 pc.
Disconnect the fan connector.
Connector No. FANP-1.FANAP
Remove the earth cable from the fan.
Phillips screwdriver #2
Screw M4 1 pc.
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Machinery Part Replacement Main Body
Remarks
Item
Remove the bolts from the vacuum pump holding bracket.
Allen key 6 mm
Screw M8 4 pcs.
Pull out the vacuum pump.
Remove the tube joint from the vacuum pump.
Wrench 22 mm
Wrench 19 mm
Wrench 14 mm
Fit the tube joint into the new pump.
Wrench 22 mm
Wrench 19 mm
Wrench 14 mm
Sealing tape
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Machinery Part Replacement Main Body
Remarks
Item
Replace the vacuum pump bracket. (Take care with orientation of the bracket.)
How to distinguish orientation:
Hole position is different for the front and
the inner sides.
Allen key 6 mm
Screw M8 4 pcs.
Install the vacuum pump.
Allen key 6 mm
Screw M8 4 pcs.
Tighten the bolts of the vacuum pump holding bracket.
Allen key 6 mm
Screw M8 4 pcs.
Put the fan earth cable back on.
Phillips screwdriver #2
Screw M4 1 pc.
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