TR7500_Series_Software_v29_En.pdf - 第299页
Test Research Inc. TR7500 Series User Guide – Software v.2.9.0 277 Figure 468 : Mask Dark Zon e Mask Bright Zone Figure 469 : Mask Bright Zo ne 11.9.5. 2 ROI Parameter Set the ROI paramete r s. Figure 470 : ROI Paramet…
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276 TR7500 Series User Guide –Software v.2.9.0
Figure 465: Select ROI Copy Rule
Step4. Select the mask zone – the area not to be inspected.
Figure 466: Mask Zone Options
Default Zone
Figure 467: Default Mask Zone
Mask Dark Zone
Test Research Inc.
TR7500 Series User Guide –Software v.2.9.0 277
Figure 468: Mask Dark Zone
Mask Bright Zone
Figure 469: Mask Bright Zone
11.9.5.2 ROI Parameter
Set the ROI parameters.
Figure 470: ROI Parameters Dialog
[Train] –Set the parameter for training.
[Sensitivity] – Use 70 as an example. If the difference of the gray level between
neighboring pixels is larger than 30 (100-70) the two pixels will be regarded as
edges.
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278 TR7500 Series User Guide –Software v.2.9.0
[Mask Zone] – Use 1 as an example. Next to the edge points the adjacent 1 pixel
point is masked as untest.
[Inspection Parameter] – Set the parameters for inspection. The system only
inspects the area that is in the ROI box and not masked.
[Inspect Sensitivity] – Use 60 as an example. If the difference of gray level
between neighboring pixels is larger than 40 (100-60) the two pixels will be
regarded as edges.
[Tolerance] – Use 5 as an example. If a group size of edges is more than 5 the
inspection window will be regarded as failed.
The [Train Sensitivity] value must be bigger than [Inspect Sensitivity] or it will result
in more false alarms.
11.9.5.3 Delete ROI
Press the button to delete all ROI windows in the FOV.