00197498-03_UM_SiplaceCA-Serie_EN.pdf - 第214页

4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA- Series 4.2 Overview of the Modules From software version SC.708.0 Edition 12/2014 214 4 Fig. 4.2 - 2 Supply unit for the SWS, front view 4 (1) Electronic unit front (2…

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User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.2 Overview of the Modules
213
4.2 Overview of the Modules
4
Fig. 4.2 - 1 Overview of the SWS
4
(1) Gripper (2) Flip Unit
(3) Installation location for options (die attach
unit or linear dipping unit)
(4) Die Ejector
(5) Supply Unit (6) X unit
(7) Magazine lift
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2
3
4
5
6
7
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.2 Overview of the Modules From software version SC.708.0 Edition 12/2014
214
4
Fig. 4.2 - 2 Supply unit for the SWS, front view
4
(1) Electronic unit front (2) Computer unit
(3) Transformer (4) Pressure switch
(5) Mains filter (6) Solenoid valve
(7) Cover
3
2
1
7
6
5
4
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.2 Overview of the Modules
215
4
Fig. 4.2 - 3 Overview of the modules for the SWS
(1) Clamping unit (2) Wafer camera
(3) Flip Unit (4) Wafer support
(5) Guidance
4
3
1
2
5