00197498-03_UM_SiplaceCA-Serie_EN.pdf - 第229页
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS) From software version SC.708.0 Edition 12/2014 4.3 Description of the SWS Modules 229 4.3.7.2 W afer changer According to the lo cation (2 and 4 o r 1 and 3) the…
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.3 Description of the SWS Modules From software version SC.708.0 Edition 12/2014
228
4.3.7.1 Magazine lift
4
Fig. 4.3 - 11 Magazine lift
(1) Magazine unit with exchangeable plate for holding 8" and 12 " magazine cassettes
(2) Motor
(3) Wafer changer with cover
4
2
3
1
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.3 Description of the SWS Modules
229
4.3.7.2 Wafer changer
According to the location (2 and 4 or 1 and 3) there are two different versions of the wafer changer.
4
Fig. 4.3 - 12 Main gripper modules (location 2,4)
4
(1) Gripper (2) Toothed belt axis
(3) Installation location for barcode scanner
(optional)
(4) AD-MOT board below the cover
(5) Motor with coupling
1
4
5
3
2
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.3 Description of the SWS Modules From software version SC.708.0 Edition 12/2014
230
4
Fig. 4.3 - 13 Main gripper modules (location 1,3)
4
(1) Gripper (2) Toothed belt axis
(3) Insertion location for barcode scanner
(optional)
(4) AD-MOT board
(5) Motor with coupling
1
2
4
5
3