00197498-03_UM_SiplaceCA-Serie_EN.pdf - 第240页
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA- Series 4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014 240 4.5.5.2 Settings 4 Fig. 4.5 - 4 SIPLACE SWS Wafer S tretcher - setting the st…
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher
239
4.5.5 Mechanically Setting the Stretching Factor
The stretching factor can be mechanically set at the SIPLACE SWS Wafer Stretcher in four steps.
The relevant settings must be performed at six different points.
4.5.5.1 Preparations
Close all current processes on the SWS module.
Move the wafer table into the changeover position.
In the view, select Manual operations -> Wafer handling systems -> Go to change
position.
Open the clamp.
In the view, select Manual operations -> Wafer handling systems ->Open wafer
clamp.
– The clamp will open and the expansion ring will move downwards.
Open the expander
In the view, select Manual operations -> Wafer handling systems ->Release
stretcher.
– The downholder plate will move upwards.
In the view, select Production -> Other and click on the red "off" button there.
SWS GUI and Linux are shut down properly. 4
Switch off the SWS at the main switch.
CAUTION
Avoid damage to the gripper
The gripper could be damaged while you are working on the wafer support.
Push the gripper in the direction of the wafer lift and out of the wafer support working
area.
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014
240
4.5.5.2 Settings
4
Fig. 4.5 - 4 SIPLACE SWS Wafer Stretcher - setting the stretching factor
Loosen the screw (2) at all four points (1).
Push the screw (2) to the position for the required stretching factor (2, 4, 6, or 8 mm).
Tighten the screw (2).
At both points (3), turn the screw to the position for the required stretching factor (2, 4, 6, or
8 mm).
1
1
1
1
3
3
1
2
3
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher
241
4.5.6 Setting the frame width for 8" wafer supports
The width of the wafer needs to be set for 8" wafer support. This is not needed for 12" wafer sup-
ports.
Wafers with a width of 10.5" (FF 105) or 10.8" (FF 108) can be processed. The mechanical ad-
justments must be made at seven positions, depending on the width.
4.5.6.1 Preparations
Close all current processes on the SWS module.
Move the wafer table into the changeover position.
In the view, select Manual operations -> Wafer handling systems -> Go to change
position.
Open the clamp.
In the view, select Manual operations -> Wafer handling systems ->Open wafer
clamp.
– The clamp will open and the expansion ring will move downwards.
Open the expander
In the view, select Manual operations -> Wafer handling systems ->Release
stretcher.
– The downholder plate will move upwards.
In the view, select Production -> Other and click on the red "off" button there.
SWS GUI and Linux are shut down properly. 4
Switch off the SWS at the main switch.
CAUTION
Avoid damage to the gripper
The gripper could be damaged while you are working on the wafer support.
Push the gripper in the direction of the wafer lift and out of the wafer support working
area.