00197498-03_UM_SiplaceCA-Serie_EN.pdf - 第254页

4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA- Series 4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014 254 Fitting the stroke ring 4 4 Fig. 4.5 - 16 Wafer support - fitting the stroke …

User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)

From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher

253

Fitting the cover plate (for 12" wafer support only) 4

Fit the cover plate onto the wafer support, using the 4 screws.

Fig. 4.5 - 15 Wafer support - fitting the cover plate

4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series

4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014

254

Fitting the stroke ring 4

Fig. 4.5 - 16 Wafer support - fitting the stroke ring

 Insert the stroke ring (1).

 Insert the four springs (3) into the four holes.

 Fit the four fixing discs (2) into place.

 Fasten the fixing discs into place with the fastening screws (4).

User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)

From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher

255

Fitting the downholder plates 4

Fig. 4.5 - 17 Wafer support - removing the downholder plate

 Align the lifting piston with the auxiliary tool (2) so that the opening points outwards.

 Place the downholder plates from the 12" retrofit kit onto the wafer support.

 Insert the conical fixing discs (3) into the hole.

 Loosely tighten the downholder plates with the screws.

 Insert the auxiliary tool (4) into the opening and fix into place with the lifting piston inside.

 Tighten all 4 screws (1) on the two downholder plates (5).