00197498-03_UM_SiplaceCA-Serie_EN.pdf - 第251页
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS) From software version SC.708.0 Edition 12/20 14 4.5 SIPLACE SWS Wafer Stretcher 251 Fitting the sensors in the 12" wafer support 4 Fit the two sensors with …
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014
250
Fitting the sensors on the assembly brackets for the 12" 4
4
Fig. 4.5 - 11 Wafer support - sensor 1
(1) Assembly bracket
(2) Sensor fitted to assembly bracket
4
Fig. 4.5 - 12 Wafer support - sensor 2
(1) Assembly bracket
(2) Sensor fitted to assembly bracket
Fit the two sensors (2) to the assembly bracket (1) from the 12" retrofit kit.
1
2
1
2
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher
251
Fitting the sensors in the 12" wafer support 4
Fit the two sensors with the assembly brackets into the wafer support.
4
Fig. 4.5 - 13 Wafer support - fitting the sensors
Reconnect the sensor connections.
Fit the two sensors with the assembly brackets into the wafer support.
1
2
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014
252
Fitting the block to the clamp 4
4
Fig. 4.5 - 14 Wafer support - fitting the block for the clamp
Fit the block (2) from the 12" retrofit kit onto the clamp (1).
1
2