4OM-1603-007_w.pdf - 第110页

4OM-1603 1-55 4. Maintenance Method : Chap.1 4.2 Method of detaching vacuum nozzle • Store the nozzle in the nozzle stocker (housing) through window navigations and take out the nozzle stocker (housing). Notice (a) Do no…

4OM-1603

1-54

4. Maintenance Method : Chap.1

4.1 Cleaning Method of Vacuum Nozzles

Remove Nozzle Filter

Refer to "4.3 Nozzle Filter Removal Procedure"

for details.

Blow air Vacuum Nozzle

Confirm that there is no clog in pick-up hole

Refer to "4.4 Method of Blow air" for details.

Confirm the clog in the top of pick-up hole by

the magnifying glass.

Refer to "4.5 Cleaning of high-speed nozzle

hole part with pin gauge" for details.

Remove Vacuum Nozzle

Refer to "4.2 Method of detaching vacuum

nozzle" for details.

Insert the nozzle filter

Refer to "4.6 Nozzle Filter Insertion Procedure"

for details.

Reference

F4A39-1a

1202-001

4OM-1603

1-55

4. Maintenance Method : Chap.1

4.2 Method of detaching vacuum nozzle

•

Store the nozzle in the nozzle stocker (housing) through window

navigations and take out the nozzle stocker (housing).

Notice

(a) Do not take out a nozzle from the head by hand. Otherwise, the

nozzle does not conform to the nozzle data.

(b) When the ultrasonic cleaning operation is to be performed

underwater,removethenozzlelter.

Do not use anything other than water for the cleaning.

Keeptheheadsectionfreeofanymagneticeld.

As an example,

•

Do not bring a magnet close to the head section.

•

Do not bring any demagnetizer to the head section.

Demagnetize the vacuum nozzle each unit.

Reference

Refer to "5. Nozzle Change Window" in "Chapter 6 (Vol. 2)" for the

procedure of nozzle storage.

1202-003

4OM-1603

1-56

4. Maintenance Method : Chap.1

1202-002

4.3 Nozzle Filter Removal Procedure

Push out the nozzle lter using the lter removal jig as shown in the following

gure.

Filter Removing Jig

Vacuum Nozzle

Push

Pushing out the nozzle filter.

F4A39-3