4OM-1603-007_w.pdf - 第188页

4OM-1603 3-13 3. Error IDs and Remedial Procedures : Chap.3 1 109-006 Error ID Error Name, Description, Cause, and Remedy 400f02 Safety Cover FailedinlockingSimpliedCover . ----- 400f03 Safety Cover Failed in lockin…

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4OM-1603
3-12
3. Error IDs and Remedial Procedures : Chap.3
1109-006
Error ID Error Name, Description, Cause, and Remedy
400c04 Nozzle stocker down time out
Nozzle stock unit lower bound detection 4 was not turned on in prescribed time.
Pleaseconrmthelowerbounddetection4sensorofnozzlestockunit.
400d01 Software Interlock Error
Head1 NL axis's poor operation was detected, and the scram of the XY axis was
carried out.
Please perform a zeroing.
400d02 Software Interlock Error
Head2 NL axis's poor operation was detected, and the scram of the XY axis was
carried out.
Please perform a zeroing.
400d03 Software Interlock Error
NL axis(Head2) Interlock Detected.
Pleaseconrmthenozzlehasnotfallenwhenyoupushthebeambythehand.
Please perform a zeroing.
400d04 Software Interlock Error
NL axis(Head1) Interlock Detected.
Pleaseconrmthenozzlehasnotfallenwhenyoupushthebeambythehand.
Please perform a zeroing.
400d05 Software Interlock Error
L1 axis(Head2) Interlock Detected.
Pleaseconrmthenozzlehasnotfallenwhenyoupushthebeambythehand.
PleaseconrmdetectionofPassLine,excesspushing.
400d06 Software Interlock Error
L2 axis(Head2) Interlock Detected.
Pleaseconrmthenozzlehasnotfallenwhenyoupushthebeambythehand.
PleaseconrmdetectionofPassLine,excesspushing.
400d07 Software Interlock Error
L3 axis(Head2) Interlock Detected
PleaseconrmdetectionofPassLine,excesspushing.
400d08 Software Interlock Error
L1 axis(Head1) Interlock Detected.
Pleaseconrmthenozzlehasnotfallenwhenyoupushthebeambythehand.
PleaseconrmdetectionofPassLine,excesspushing.
400d09 Software Interlock Error
L2 axis(Head1) Interlock Detected.
Pleaseconrmthenozzlehasnotfallenwhenyoupushthebeambythehand.
PleaseconrmdetectionofPassLine,excesspushing.
400d0a Software Interlock Error
L3 axis(Head1) Interlock Detected.
Pleaseconrmthenozzlehasnotfallenwhenyoupushthebeambythehand.
PleaseconrmdetectionofPassLine,excesspushing.
400f01 Safety Cover
Safety cover opened
Close the safety cover and lock it.
4OM-1603
3-13
3. Error IDs and Remedial Procedures : Chap.3
1109-006
Error ID Error Name, Description, Cause, and Remedy
400f02 Safety Cover
FailedinlockingSimpliedCover.
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400f03 Safety Cover
Failed in locking Auto Cover.
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401001 Cart
No Cart
There is a possibility that the Front/Rear of Cart is missing. Please put the cart in.
401101 Emergency Stop Switch
The [emergency stop] switch was pressed.
(Pleaseconrmthenozzlehasnotfallenwhenyoupushthebeambythehand.)
Please switch on a power supply after canceling an emergency stop switch and
screen return to normal display.
401201 Safety Cover
The safety cover opened. [S131,S132]
Please shut a safety cover and push the [POWER ON] button.
401301 Shut-off Beam
The main circuit of the XY Beam was broken. [K33A,K33B]
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401401 Head1 Nozzle descending
Head1 nozzle descent was detected. [A-B3104]
Please perform a zeroing.
401501 Head2 Nozzle descending
Head2 nozzle descent was detected. [B-B3104]
Please perform a zeroing.
401601 Head1 Nozzle descending
Head1 descent was detected. [A-B3103]
Please perform a zeroing.
401701 Head2 Nozzle descending
Head2 descent was detected. [B-B3103]
Please perform a zeroing.
401801 Detecting pickup miss Cmpnt(Block1)
A pickup-failed component (Block1) was detected. [DA-B0514]
1. Open the cover.
2. Conrmsuppressor,DisengagedLatchandremovethePickupmisscmpnt.
3. Close the cover and then Lock it.
401901 Detecting pickup miss Cmpnt(Block2)
A pickup-failed component (Block2) was detected. [DB-B0515]
1. Open the cover.
2. Conrmsuppressor,DisengagedLatchandremovethePickupmisscmpnt.
3. Close the cover and then Lock it.
401A01 Feeder Opening Sensor(Block1)
The feeder opening sensor (Block1) was shaded. [B****]
Please remove the factor which is shading the feeder opening sensor (Block1),
and carry out zero return.
4OM-1603
3-14
3. Error IDs and Remedial Procedures : Chap.3
1109-006
Error ID Error Name, Description, Cause, and Remedy
401B01 Feeder Opening Sensor(Block2)
The feeder opening sensor (Block2) was shaded. [B****]
Please remove the factor which is shading the feeder opening sensor (Block2),
and carry out zero return.
401C01 Detecting Feeder Disengaged Latch(Block1)
Disengaged Latch(Block1) was detected.
1. Open the cover.
2. Conrmsuppressor,DisengagedLatchandremovethePickupmisscmpnt.
3. Close the cover and then Lock it.
401D01 Detecting Feeder Disengaged Latch(Block2)
Disengaged Latch(Block2) was detected.
1. Open the cover.
2. Conrmsuppressor,DisengagedLatchandremovethePickupmisscmpnt.
3. Close the cover and then Lock it.
401E01 Cancelling the safety cover lock
The safety cover lock was released.
Close the safety cover and lock it.
401F01 Detecting interlock of Head1
Head1 interlock was detected.
Please perform a zeroing.
402001 Detecting interlock of Head2
Head2 interlock was detected.
Please perform a zeroing.
402101 Detecting air pressure down
Air pressure down was detected.
Check air pipe came off or bend, air compressor.
402201 Vacuum pump stop
Circuit breaker of Vacuum pomp was tripped.
Check vacuum pump and wiring.
402301 Beam1 Breaker Off
Circuit breaker of XY Beam1 was tripped.
Checkservoamplierandcables.
402401 Beam2 Breaker Off
Circuit breaker of XY Beam2 was tripped.
Checkservoamplierandcables.
402501 Over squeeze1 detected (Head1)
Over squeeze1 detected (Head1)[B05]
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402601 Over squeeze2 detected (Head1)
Over squeeze2 detected (Head1)[B05]
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402701 Over squeeze3 detected (Head1)
Over squeeze3 detected (Head1)[B05]
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402801 Pass Line1 Detected(Head1)
Pass Line1 detected(Head1)[B04]
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