4OM-1603-007_w.pdf - 第118页

4OM-1603 1-63 4. Maintenance Method : Chap.1 1012-003 (4) Fix the nozzle ange holding its lower surface upward by nger so that the nozzle is not inclined. Nozzle Press it upward. F4A39-7 (5) Push the sliding section to…

4OM-1603

1-62

4. Maintenance Method : Chap.1

1003-001

•

For the Nozzles for Middle-Size and Odd-Shape Components

Procedure

(1) Set the nozzle lter in the hole section.

Hole Section

Nozzle Filter

F4A39-4

(2) Insert the lter holding block into the opening section of the lter set.

Filter Holding Block

F4A39-5

(3) Orient the nozzle lter opening section to the lter insertion jig and insert the

nozzle into the guide section.

Note

Pay attention to the direction of the nozzle lter opening section.

Guide Section

F4A39-6

4OM-1603

1-63

4. Maintenance Method : Chap.1

1012-003

(4) Fix the nozzle ange holding its lower surface upward by nger so that the

nozzle is not inclined.

Nozzle

Press it

upward.

F4A39-7

(5) Push the sliding section to the main machine acrylic block end face and

insert the nozzle lter.

Acrylic Block End Face

Sliding Section

Push

F4A39-8

4OM-1603

1-64

5. Use Procedure of Diffusion Plate Setup Jig : Chap.1

1202-002

5. Use Procedure of Diffusion Plate Setup Jig

Procedure

(1) Set the both inner and outer diffusion plates temporarily.

Outer Diffusion Plate

Inner Diffusion Plate

F4A40

(2) Attach the Jigs No. 1 and No. 2 onto the three locations as shown in the

gure.

Take care not to damage the linear measure sensor.

Jig 1 Jig 2

F4A41

(2) After xing the diffusion plates using bolts, remove the jigs No. 1 and No. 2.

F4A42