4OM-1603-007_w.pdf - 第337页
4OM-1603 3-162 3. Error IDs and Remedial Procedures : Chap.3 1012-005 3.15 Coplanarity Error ID Error Name, Description, Cause, and Remedy 6b0101 Coplanarity System Error Communication time-out. Check the coupling networ…

4OM-1603
3-161
3. Error IDs and Remedial Procedures : Chap.3
1012-005
3.14 Test
Error ID Error Name, Description, Cause, and Remedy
610101 Opearation error has occurred.
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T4C16

4OM-1603
3-162
3. Error IDs and Remedial Procedures : Chap.3
1012-005
3.15 Coplanarity
Error ID Error Name, Description, Cause, and Remedy
6b0101 Coplanarity System Error
Communication time-out.
Check the coupling network cable between the Coplanarity unit PC and the main
machine.
6b0102 Coplanarity System Error
Error command.
There is a possibility of following error.
1. Coplanarity Unit
2. Software Error
Shut down the device, and turn it on again. Please contact the service when not
repaired even if turns it on again.
6b0103 Coplanarity System Error
Error received data.
There is a possibility of following error.
1. Coplanarity Unit
2. Software Error
Shut down the device, and turn it on again. Please contact the service when not
repaired even if turns it on again.
6b0104 Coplanarity System Error
Error sequence.
There is a possibility of following error.
1. Coplanarity Unit
2. Software Error
Shut down the device, and turn it on again. Please contact the service when not
repaired even if turns it on again.
6b1001 Coplanarity System Error
System error. (1000)
Error in Coplanarity Unit. Shut down the device, and turn it on again. Please
contact the service when not repaired even if turns it on again.
6b1011 Coplanarity System Error
Memory error in unit.(1010)
Error in Coplanarity Unit. Shut down the device, and turn it on again. Please
contact the service when not repaired even if turns it on again.
6b1061 Coplanarity System Error
Laser error.(1060)
Error in Coplanarity Unit. Shut down the device, and turn it on again. Please
contact the service when not repaired even if turns it on again.
6b1071 Coplanarity System Error
Memory error in sensor section. (1070)
Error in Coplanarity Unit. Shut down the device, and turn it on again. Please
contact the service when not repaired even if turns it on again.
6b1081 Coplanarity System Error
Sensor cable not connected. (1080)
Check the connection between the Coplanarity unit PC and the sensor head.

4OM-1603
3-163
3. Error IDs and Remedial Procedures : Chap.3
1012-005
Error ID Error Name, Description, Cause, and Remedy
6b1091 Coplanarity System Error
Unsteady motor rotation in sensor. (1090)
Check the connection of the power cable for the sensor head.
6b1101 Coplanarity System Error
Laser OFF. (1100)
Error in Coplanarity Unit. Shut down the device, and turn it on again. Please
contact the service when not repaired even if turns it on again.
6b2001 Coplanarity Operation Error
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6b2011 Coplanarity Operation Error
Wrong level adjustment. (2010)
There is a possibility of following error.
1. Coplanarity Unit
2. Data loss
3. Software Error
Shut down the device, and turn it on again. Please contact the service when not
repaired even if turns it on again.
6b2031 Coplanarity Operation Error
Wrong component no. (2030)
There is a possibility of following error.
1. Coplanarity Unit
2. Data loss
3. Software Error
Shut down the device, and turn it on again. Please contact the service when not
repaired even if turns it on again.
6b2041 Coplanarity Operation Error
Measurement Start Signal Not Recognized. (2040)
Check the coupling cable between the Coplanarity unit PC and the main machine.
(Measurement Start Signal)
6b2051 Coplanarity Operation Error
Illegal Command Parameter. (2050)
There is a possibility of following error.
1. Coplanarity Unit
2. Data loss
3. Software Error
Shut down the device, and turn it on again. Please contact the service when not
repaired even if turns it on again.
6b2061 Coplanarity Operation Error
Unknown Reference Component Data. (2060)
There is a possibility of following error.
1. Coplanarity Unit
2. Data loss
3. Software Error
Shut down the device, and turn it on again. Please contact the service when not
repaired even if turns it on again.