00195941-03-UM SiplaceCA-EN.pdf - 第162页
3 Technical Data User Manual SIPLACE CA 3.7 SIPLACE Wafer System (SWS) Edition 08/2011 EN 162 Fig. 3.7 - 14 Overview of the modu les of the SWS (1) Clamping unit (2) W afer camera (3) Flip unit (4) W afer support (5) Gui…
User Manual SIPLACE CA 3 Technical Data
Edition 08/2011 EN 3.7 SIPLACE Wafer System (SWS)
161
Fig. 3.7 - 13 Supply unit of the SWS front view
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(1) Electronic unit front (2) Computer unit
(3) Transformer (4) Pressure switch
(5) Mains filter (6) Solenoid valve
(7) Cover
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2
1
7
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3 Technical Data User Manual SIPLACE CA
3.7 SIPLACE Wafer System (SWS) Edition 08/2011 EN
162
Fig. 3.7 - 14 Overview of the modules of the SWS
(1) Clamping unit (2) Wafer camera
(3) Flip unit (4) Wafer support
(5) Guide
4
3
1
2
5
User Manual SIPLACE CA 3 Technical Data
Edition 08/2011 EN 3.7 SIPLACE Wafer System (SWS)
163
3.7.6 Description of the SWS Modules
3.7.6.1 Supply Unit
Fig. 3.7 - 15 Supply unit
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(1) Manometer for compressed air supply (2) Voltage supply
(3) Communication with SIPLACE machine (4) CAN bus
(5) Compressed air connection (modified
adapter dummy connector [03011592-01])
(6) LAN1
(7) LAN2
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