00195941-03-UM SiplaceCA-EN.pdf - 第163页
User Manual SIPLACE CA 3 Technical Data Edition 08/2011 EN 3.7 SIPLACE Wafer System (SWS) 163 3.7.6 Description of the SWS Modules 3.7.6.1 Supply Unit Fig. 3.7 - 15 Supply unit 3 (1) Manometer for compresse d air supply …
3 Technical Data User Manual SIPLACE CA
3.7 SIPLACE Wafer System (SWS) Edition 08/2011 EN
162
Fig. 3.7 - 14 Overview of the modules of the SWS
(1) Clamping unit (2) Wafer camera
(3) Flip unit (4) Wafer support
(5) Guide
4
3
1
2
5
User Manual SIPLACE CA 3 Technical Data
Edition 08/2011 EN 3.7 SIPLACE Wafer System (SWS)
163
3.7.6 Description of the SWS Modules
3.7.6.1 Supply Unit
Fig. 3.7 - 15 Supply unit
3
(1) Manometer for compressed air supply (2) Voltage supply
(3) Communication with SIPLACE machine (4) CAN bus
(5) Compressed air connection (modified
adapter dummy connector [03011592-01])
(6) LAN1
(7) LAN2
2
1
3
4
5
6
7
3 Technical Data User Manual SIPLACE CA
3.7 SIPLACE Wafer System (SWS) Edition 08/2011 EN
164
3.7.6.2 Flip Unit
3
Fig. 3.7 - 16 Flip unit
3
3
(1) Flip head (2) Nozzle or tool take-up
1
2
2