00195941-03-UM SiplaceCA-EN.pdf - 第176页
3 Technical Data User Manual SIPLACE CA 3.7 SIPLACE Wafer System (SWS) Edition 08/2011 EN 176 3 Fig. 3.7 - 26 Modules of the gripper (location 2 and 4) 3 (1) Gripper (2) T oothed belt axis (3) Insertion location fo r bar…
User Manual SIPLACE CA 3 Technical Data
Edition 08/2011 EN 3.7 SIPLACE Wafer System (SWS)
175
Magazine lift
3
Fig. 3.7 - 25 Magazine lift
(1) Magazine unit with changeover plate for inserting 8" and 12" magazine cassettes
(2) Motor
(3) Wafer changer with cover
3
Wafer changer
According to the location (2 and 4 or 1 and 3) there are two different versions of the wafer changer.
2
3
1
3 Technical Data User Manual SIPLACE CA
3.7 SIPLACE Wafer System (SWS) Edition 08/2011 EN
176
3
Fig. 3.7 - 26 Modules of the gripper (location 2 and 4)
3
(1) Gripper (2) Toothed belt axis
(3) Insertion location for barcode scanner
(optional)
(4) AD-MOT board below the cover
(5) Motor with coupling
1
4
5
3
2
User Manual SIPLACE CA 3 Technical Data
Edition 08/2011 EN 3.7 SIPLACE Wafer System (SWS)
177
3
Fig. 3.7 - 27 Modules of the gripper (location 1 and 3)
3
(1) Gripper (2) Toothed belt axis
(3) Insertion location for barcode scanner
(optional)
(4) AD-MOT board
(5) Motor with coupling
1
2
4
5
3