YAMAHA 报警资料.pdf - 第40页

Comparison Table ( English - Chinese ) VGOS V2.46STD R1.000 40 / 237 Copyright (C) 2009 Y amaha Motor Co., Ltd. All Rights Reserved. Code Code Code Code Englis h Englis h Englis h Englis h Chinese Chinese Chinese Chinese…

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Comparison Table ( English - Chinese )
VGOS V2.46STD R1.000 39 / 237 Copyright (C) 2009 Yamaha Motor Co.,Ltd. All Rights Reserved.
Code
CodeCode
Code
English
EnglishEnglish
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Chinese
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Heater broken.
No connection between temperature sensor and the heater.
Error in the head IO system.
·Head 的 IO 系󱮴的异常
Ea00828 HEAD 2 HEATER TEMPERATURE OVERHEATED
Unusual temperature of the head heater or a
feedback error was detected.
You cannot run the machine under this condition.
Please check Heater condition.
Possible cause:
Temperature sensor broken.
Heater broken.
No connection between temperature sensor and the heater.
Error in the head IO system.
点胶 2 加󰷂器高温异常
已󰖕出点胶 2 加󰷂器高温或反󳙝󳇮󲣄。
排除温度异常后，重新启机器后才能运行。
可能由以下原因造成。
·温度感器的断󱮔
·加󰷂器的断󱮔
·温度感器和加󰷂器的分离
·Head 的 IO 系󱮴的异常
Ea00829 HEAD 3 HEATER TEMPERATURE OVERHEATED
Unusual temperature of the head heater or a
feedback error was detected.
You cannot run the machine under this condition.
Please check Heater condition.
Possible cause:
Temperature sensor broken.
Heater broken.
No connection between temperature sensor and the heater.
Error in the head IO system.
点胶 3 加󰷂器高温异常
已󰖕出点胶 3 加󰷂器高温或反󳙝󳇮󲣄。
排除温度异常后，重新启机器后才能运行。
可能由以下的原因造成。
·温度感器的断󱮔
·加󰷂器的断󱮔
·温度感器和加󰷂器的分离
·Head 的 IO 系󱮴的异常
Ea00831 MAIN STOPPER INTERLOCK
Operation of the main stopper in this table height
cannot be performed.
-Please lower the Board table.
Or You can't move table on dangerous position,
because the main stopper is upper.
-Please move main stopper down.
主板上升󲲳󳇖
此工作台的高度主当板不能工作。
-󲣌下降基板工作台。
或、在主当板上升的状下、不能移到
危󳌾工作台高度。
-󲣌下降主板。
Ea00832 QUICK STOP ACTIVE:
"ALARM: COOLING FAN Y1-AXIS IS NOT WORKING"
QUICK STOP FUNCTION is now active.
Please check the status.
因[Y1 󲱉󳝁达冷却󳖣扇停止]，󱧼急停机功能正于有效状。
󲣌确󲡹 Y1 󲱉󳝁达冷却󳖣扇的状。
Ea00833 QUICK STOP ACTIVE:
"ALARM: COOLING FAN Y2-AXIS IS NOT WORKING"
QUICK STOP FUNCTION is now active.
Please check the status.
因[Y2 󲱉󳝁达冷却󳖣扇停止]，󱧼急停机功能正于有效状。
󲣌确󲡹 Y2 󲱉󳝁达冷却󳖣扇的状。
Ea00834 QUICK STOP ACTIVE:
"ALARM: COOLING FAN WAFER CAMERA LIGHT IS NOT WORKING"
QUICK STOP FUNCTION is now active.
Please check the status.
因[晶片󲢛相机照明冷却󳖣扇停止]，󱧼急停机正于有效状。
󲣌确󲡹晶片󲢛相机照明冷却󳖣扇的状。
Ea00848 QUICK STOP ACTIVE:
"ALARM: IONIZER IS ABNORMAL"
QUICK STOP FUNCTION is now active.
Please check the status.
󱴩󳇖󳇮󲣄
因"离子生器异常"
󱧼急停机功能正于有效状。
󲣌确󲡹离子生器的状。
Ea00850 INTERLOCK ERROR
Head down sensor is OFF.
Remove the cause of this sensor being OFF.
󱴩󳇖󳇮󲣄
存在下降端感器呈 OFF 状的 Head。
󲣌󰒺明󳇮󲣄原因并解决。
Ea00851 INTERLOCK ERROR
Transfer axis up/down sensor is OFF.
Remove the cause of this sensor being OFF.
󱴩󳇖󳇮󲣄
基板送机的下降端感器呈 OFF 状。
󲣌󰒺明󳇮󲣄原因并解决。
Ea00852 INTERLOCK ERROR
The sensor for main stopper, push-up or
entrance stopper is ON.
Remove the cause of this sensor being ON.
󱴩󳇖󳇮󲣄
主档板、󳕋󳅝、入口板中的某个感器呈 ON 状。
󲣌󰒺明󳇮󲣄原因并解决。
Ea00860 INTERLOCK ERROR
External Tray Changer head is down now.
Please change the output to up in MANUAL.
󱴩󳇖󳇮󲣄
外部托󱎭 Head 的下降端感器呈 OFF 状。
󲣌󰒺明󳇮󲣄原因并解决。
Ea00861 INTERLOCK ERROR
A pallet from tray unit is out from the rack.
Please put it into the rack.
󱴩󳇖󳇮󲣄
托󱎭交󰀷器的料架出了收󱮈柜。
󲣌把料架退回收󱮈柜。
Ea00862 INTERLOCK ERROR
One pallet from tray unit is on the table.
Please put it into the rack.
󱴩󳇖󳇮󲣄
工作台上有托󱎭交󰀷器的料架存在。
󲣌把料架退回收󱮈柜。
Ea00863 INTERLOCK ERROR
Pallet latch condition is illegal.
Possible cause:
1.The open/close sensor of Pallet latch is in the unusual
state.
2.It is going to take pallet in the state where tray unit
is closed door has closed and latch is also closed.
󱴩󳇖󳇮󲣄
料架的󳊾󳇖状不正确。
󲣌确󲡹󳊾󳇖感器的状。
Comparison Table ( English - Chinese )
VGOS V2.46STD R1.000 40 / 237 Copyright (C) 2009 Yamaha Motor Co.,Ltd. All Rights Reserved.
Code
CodeCode
Code
English
EnglishEnglish
English
Chinese
ChineseChinese
Chinese
Or it has made a mistake and reacted, latch may not have
carried out normal operation of whether latch sensor is out
of order.
Please check latch sensor and tray unit.
Ea00864 INTERLOCK ERROR
You can't move X ,Y ,R or W axis,
because Z axis is moving or Z axis position
safety sensor is OFF.
Please check Z axis position.
󱴩󳇖󳇮󲣄
Head 的高度在危󳌾位置上，
因而不能移 X、Y、R、W 󲱉。
Z 󲱉正在移或 Z 󲱉安全感器呈 OFF 状。
󲣌把 Head 移至安全高度。
Ea00865 INTERLOCK ERROR
You can't move X or Y axis,
because there isn't a nozzle station at the bottom.
󱴩󳇖󳇮󲣄
因吸嘴交󰀷站不在下降端，
所以 X、Y 󲱉不能移。
Ea00866 INTERLOCK ERROR
You can't move Z axis,
because X or Y axis is moving.
󱴩󳇖󳇮󲣄
因 X、Y 󲱉正在移，所以不能移 Z 󲱉。
Ea00869 <<<WARNING SENSOR ERROR>>>
Head down sensor or Lower Sensor is OFF in A-table.
Please check sensor and remove the cause of
this sensor being OFF.
If you don't remove the cause, it is impossible
to start production.
<<<警告 感器异常>>>
在 A 工作台，󰖕出了[吸嘴下降状]。
下降端感器，或第 1 下降区域感器呈 OFF 状。
󲣌󰖕󰒺感器，󰒺明故障原因并解决。
如没有解决，不能始自运行。
Ea00870 <<<WARNING SENSOR ERROR>>>
Head down sensor or Lower Sensor is OFF in B-table.
Please check sensor and remove the cause of
this sensor being OFF.
If you don't remove the cause, it is impossible
to start production.
<<<警告 感器异常>>>
在 B 工作台，󰖕出了[吸嘴下降状]。
下降端感器，或第 1 下降区域感器呈 OFF 状。
󲣌󰖕󰒺感器，󰒺明故障原因并解决。
如没有解决，不能始自运行。
Ea00871 <<<WARNING SENSOR ERROR>>>
Head up-down action is abnormal.
Following reasons are possible.
- Board fixation is not correct.
- PickHeight or MntHeight is not correct.
- The head lower-end sensor does not function.
- The head lowering valve does not function.
- The nozzle shaft is bent.
- The head did not reach the bottom within 1 sec.
<<<警告 感器异常>>>
Head 的上下作异常，可能由以下原因造成。
- 基板的固定异常。
- 吸料高度、󲨉装高度异常。
- 下降端感器异常。
- Head 下降󳋕的作异常。
- 󲱉已形。
- 在下降始后 1 秒内未能到达下降端。
Ea00872 INTERLOCK ERROR
You can't move X or Y axis,
because there isn't a special light at the bottom.
󱴩󳇖󳇮󲣄
因特殊照明装置不在下降端，
所以不能移 X、Y 󲱉。
Ea00874 INTERLOCK ERROR
You can't move W axis, because the safety sensor
on buffer conveyor is ON.
󱴩󳇖󳇮󲣄
因󱯨冲送装置上的区域感器呈 ON 状，
所以不能移 W 󲱉。
Ea00876 INTERLOCK ERROR
You can't move TrayChanger Z axis,
because Magazine Clamp condition is illegal.
Be sure to press "EMERGENCY STOP" ON and open a door.
Please check fix of Magazine and Magazine Clamp
sensor and run again.
󱴩󳇖󳇮󲣄
因托󱎭交󰀷器的收󱮈柜固的状不正确，所以无法启󲱉。
󲣌置󱧼急停机状，并打柜󳊽，然后确󲡹收󱮈柜的固定
状和收󱮈柜固感器的状。
Ea00877 INTERLOCK ERROR
There is contradiction in the output and the input
about FNC Clutch Clamp.
In this situation, R-axis can't be worked.
Please check as following:
1.Sensor about Fnc Clutch
2.Machine data [INIT MOVE] for R-axis.
󱴩󳇖󳇮󲣄
因 FNC 离合器的󲱨入、󲱨出状不正确，
所以不能移 R 󲱉。
󲣌󰖕󰒺下列󳕎目。
1．FNC 离合感器的状
2．机器数据[R 󲱉 初始移]的数
Ea00879 <<WARNING SENSOR ERROR>
NOZZLE DOWN LIMIT SENSOR CHECK ERROR
Nozzle down limit sensor is ON even when the head
reach lower-end.
The sensor condition is not correct and this may
cause big problem.
Please check the sensor and remove the cause of
this sensor keeps being ON.
TABLE
Error Detail No.
<<重大󳇮󲣄>>
第 1 下降区域感器󰖕󰒺󳇮󲣄
󲍒然下降端感器于 OFF 状，但第 1 下降区域感器仍 ON。
如在此状下󱮼󱯂自运行，有可能造成󲨉装󰀴坏等重大事故。
󲣌立即󰖕󰒺第 1 下降区域感器。
工作台号󱓖
󳇮󲣄󲢻󱮛 No.
Ea00880 <<WARNING VACUUM LEVEL ERROR>
MOUNT IO SEQUENCE VACUUM LEVEL ERROR
Vacuum level has not reached the specified level.
Please check the nozzle and valve condition.
This may cause bring-back cmp. or double mount
problem.
<<重大󳇮󲣄>>
IO 作流程󲨉装元件󰋋气󰖕󰒺󳇮󲣄
在󲨉装元件󰋋未能充分降低气。
因元件可能被回，所以󲣌立即󰖕󰒺吸嘴和󳋕等。
如在此状下󱮼󱯂自运行，可能会引起元件被
回或重󲨉装等󳋃󳕭。
Comparison Table ( English - Chinese )
VGOS V2.46STD R1.000 41 / 237 Copyright (C) 2009 Yamaha Motor Co.,Ltd. All Rights Reserved.
Code
CodeCode
Code
English
EnglishEnglish
English
Chinese
ChineseChinese
Chinese
Head No.
󲨉装号󱓖 号
Ea00881 INTERLOCK ERROR
You can't move N axis,
because there is some heads with INDEX nozzle.
󱴩󳇖󳇮󲣄
不能启 N 󲱉。
󲣌󰖕󰒺下列󳕎目。
1．吸嘴交󰀷站的吸嘴正安装在󲨉装上。
2．吸嘴交󰀷站的感器状不正常。
Ea00882 INTERLOCK ERROR
You can't move axis,
because digital multi camera lights were up.
Please check below.
1. Are digital multi camera lights up?
2. Are digital multi camera lights sensor good?
󱴩󳇖󳇮󲣄
因数󱓖多󲚛󲚞相机的照明正在上升，
所以不能移󲱉。
󲣌󰖕󰒺下列󳕎目。
1．数󱓖多󲚛󲚞相机照明是否在上升
2．数󱓖多󲚛󲚞相机照明的感器状是否正常
Ea00883 INTERLOCK ERROR
You can't move W axis, because the cover
on lower conveyor is open.
󱴩󳇖󳇮󲣄
因收到了下送装置机盖启的信号，
所以不能移 W 󲱉。
Ea00884 ALARM!
The lights of a wafer camera have been turned off,
because they were switched on too long.
If it is necessary, please turn it on again.
警告!
因晶片󲢛相机照明的󲲳󱯂点灯󰋋󳋉超󲲜了󲚙定的󰋋󳋉，
所以󳋂了照明。
如有必要，󲣌重新打照明。
Ea00887 INTERLOCK ERROR
You can't move X or Y axis,
because some nozzles exist in the shaft cleaning blow units.
󱴩󳇖󳇮󲣄
因吸嘴吸嘴󲱉排气站的吸嘴󰖕󰒺感器正在感，
所以 X,Y 󲱉无法移。
Ea00888 ILLEGAL NOZZLE DOWN ACTION 1
Head down action is abnormal.Following reasons are possible.
- Board fixation is not correct.
- MntHeight is not correct.
- The nozzle shaft is bent.
- The head did not reach the bottom within 1 sec.
- Fatal error occurred in Servo system.
- Fatal error occurred in I/O communication.
TABLE
HEAD
󲨉装下降作异常
󲨉装无法到达下降端。可能是以下原因所致。
- 基板固定异常
- 󲨉装高度异常
- 吸嘴󲱉形
- 下降始后 1 秒内没有到达下降端
- 伺服端口异常
- I/O 端口异常
工作台号󱓖
Head 号󱓖 号
Ea00889 ILLEGAL NOZZLE DOWN ACTION 2
Head down action is abnormal.Following reasons are possible.
- MntHeight is not correct.
- The nozzle shaft is bent.
- Fatal error occurred in Servo system.
- Fatal error occurred in I/O communication.
TABLE
HEAD
󲨉装下降作异常
󲨉装的下降作异常。可能由下列原因所致。
- 󲨉装高度异常
- 吸嘴󲱉形
- 伺服端口异常
- I/O 端口异常
工作台号󱓖
Head 号󱓖 号
Ea00890 ILLEGAL NOZZLE DOWN ACTION 3
Head down action is abnormal.Following reasons are possible.
- MntHeight is not correct.
- The nozzle shaft is bent.
- The head did not reach the blow position within 1 sec.
- Fatal error occurred in Servo system.
- Fatal error occurred in I/O communication.
TABLE
HEAD
󲨉装下降作异常
󲨉装无法到达排气始高度。可能是由以下原因所致。
- 󲨉装高度异常
- 吸嘴󲱉形
- 下降始后 1 秒内没有到达排气始高度
- 伺服端口异常
- I/O 端口异常
工作台号󱓖
Head 号󱓖 号
Ea00891 INTERLOCK ERROR
You can't move X or Y axis,
because there isn't a shaft cleaning blow unit at the bottom.
󱴩󳇖󳇮󲣄
因吸嘴󲱉排气站不在下降端，所以不能移 X、Y 󲱉。
Ea00892 Nozzle mismatch error 1
The installation nozzle and the empty situation of the nozzle station are not in
agreement.
Table
Head
Nozzle Type
The nozzle of the head may be equipped with another nozzle.
Please store the nozzle of the head in the nozzle station by hand,
and perform a nozzle change.
It is very dangerous to operate as it is. Is operation stopped?
[YES] Quit [NO] Continue
吸嘴交󰀷站不一致󳇮󲣄 1
安装的吸嘴和吸嘴站的空位不一致。
工作台号󱓖 号
Head 号󱓖 号
吸嘴󱥐型
Head 上的吸嘴可能󲣄装成其他吸嘴了。
󲣌用手将 Head 上的吸嘴放回吸嘴交󰀷站，并󲲰行吸嘴交󰀷作。
此状下󱮼󱯂生将非常危󳌾，停止操作?
[是] 停止 [否] 始
Ea00893 Nozzle mismatch error 2
The installation nozzle is in the nozzle station.
Table
Head
Nozzle Type
Please perform a nozzle change after confirming that the head
is not equipped with a nozzle.
吸嘴交󰀷站不一致󳇮󲣄 2
安装的吸嘴在吸嘴交󰀷站中。
工作台号󱓖 号
Head 号󱓖 号
吸嘴󱥐型
如确󲡹吸嘴不在 Head 上󰋋，󲣌󲲰行吸嘴交󰀷作。
如吸嘴在 Head 上󰋋，吸嘴交󰀷站上可能放着其他 Head 的吸嘴。󲣌确󲡹。